MICRO Buyers Guide Index

Tegal

2201 S. McDowell Blvd.
Petaluma, CA 94954
Tel: 707/763-5600, 800/828-3425
Fax: 707/773-3015

E-mail: skelley@tegal.com

Description:
Tegal is a leading manufacturer of plasma etch systems for microelectronic device fabrication. The company's innovative technical leadership and its focus on customer commitment provide the semiconductor, MEMS, telecommunications, data-storage, and related industries with a wide range of plasma etching solutions, along with VLSI Research's Ten Best award-winning support.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)