MICRO Buyers Guide Index

SITE Services

690 Aldo Ave.
Santa Clara, CA 95054-2207
Tel: 408/980-1155
Fax: 408/980-1267

E-mail: sales@site.com

Description:
SITE Services manufactures Tractrix Spin Track, SpinBall Spin Station, and ESVG (enhanced SVG) spinner products. The Tractrix tool is a production-grade, cassette-fed track with a small-footprint (typically 19 × 66.5 in.). It is used for coating, developing, baking, scrubbing, and other spin-applications on wafers from 50 to 200 mm (silicon and compound semiconductor substrates). The SpinBall is a single-wafer tool that handles wafers from 50 to 300 mm. It is specifically designed for R&D and low-production fabs. The company also offers hot-plate ovens for wafers and other substrates. It refurbishes and upgrades 81- and 86-style SVG tools and builds custom ESVG systems.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Photoresist Processing (track, coat, etc.) (41 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Post-Cu/Interconnect Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Spin Processors (30 companies)
• Surface Cleaning Equipment/Supplies: Spray-Clean Systems (38 companies)