MICRO Buyers Guide Index

Superior Automation

6300-C San Ignacio Ave.
San Jose, CA 95119
Tel: 408/227-4898
Fax: 408/227-4899

E-mail: dbrosio@superiorautomation.com

Description:
Superior Automation manufactures automated wet process equipment and provides factory automation products for the semiconductor industry. The company's wet process systems offer high reliability, low cost of ownership, and precision control. Its GEM Suite factory automation products include data-collection and analysis tools, remote monitoring/control, host/equipment interfaces, lot tracking, metrology feedback, bar-code interface, SPC, APC, and Web-based interface.

Categories this company is listed under in the MICRO Buyers Guide:

• Facility/System Design, Services: 300-mm Design Capabilities (27 companies)
• Facility/System Design, Services: DI Water Systems, Plant (53 companies)
• Facility/System Design, Services: Engineering, Electrical (34 companies)
• Facility/System Design, Services: Engineering, Exhaust Systems Design (41 companies)
• Facility/System Design, Services: Engineering, HVAC System Design (42 companies)
• Facility/System Design, Services: Engineering, Mechanical (56 companies)
• Facility/System Design, Services: Engineering, Process Equipment (62 companies)
• Facility/System Design, Services: Fab Automation Systems (28 companies)
• Facility/System Design, Services: Facility Management Software (25 companies)
• Facility/System Design, Services: Facility Monitoring Systems (51 companies)
• Facility/System Design, Services: Maintenance Services (34 companies)
• Facility/System Design, Services: Process Automation Services (43 companies)
• Facility/System Design, Services: Process Piping, UP Fluid (61 companies)
• Facility/System Design, Services: Waste Treatment Systems (45 companies)
• Fluids/Slurries and Delivery Systems: Acids, Etchants (34 companies)
• Fluids/Slurries and Delivery Systems: Chemical Generation/Mixing Systems (44 companies)
• Fluids/Slurries and Delivery Systems: Developers (19 companies)
• Fluids/Slurries and Delivery Systems: DI Water Heaters (34 companies)
• Fluids/Slurries and Delivery Systems: Dispensing Systems (61 companies)
• Fluids/Slurries and Delivery Systems: Filters, Filter Housings (67 companies)
• Fluids/Slurries and Delivery Systems: Flowmeters (72 companies)
• Fluids/Slurries and Delivery Systems: Heat Exchangers (38 companies)
• Fluids/Slurries and Delivery Systems: Injection Systems (22 companies)
• Fluids/Slurries and Delivery Systems: Monitoring/Analysis Tools (52 companies)
• Fluids/Slurries and Delivery Systems: Operating Software (11 companies)
• Fluids/Slurries and Delivery Systems: Photoresists (16 companies)
• Fluids/Slurries and Delivery Systems: Piping/Tubing, Other (71 companies)
• Fluids/Slurries and Delivery Systems: Piping/Tubing, Stainless Steel (46 companies)
• Fluids/Slurries and Delivery Systems: Pumps (67 companies)
• Fluids/Slurries and Delivery Systems: Regulators (41 companies)
• Fluids/Slurries and Delivery Systems: Reprocessors, Recirculation/Reclaim Systems (26 companies)
• Fluids/Slurries and Delivery Systems: Safety Equipment (21 companies)
• Fluids/Slurries and Delivery Systems: Solvents (25 companies)
• Fluids/Slurries and Delivery Systems: Storage Vessels (containers, etc.) (28 companies)
• Fluids/Slurries and Delivery Systems: Strippers (22 companies)
• Fluids/Slurries and Delivery Systems: Valves (83 companies)
• Fluids/Slurries and Delivery Systems: Waste Treatment Systems (39 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Copper Systems (28 companies)
• Process Equipment: Diffusion/Oxidation/Annealing (RTP, etc.) (41 companies)
• Process Equipment: Electrofilling/Electroplating (25 companies)
• Process Equipment: Epitaxy (24 companies)
• Process Equipment: Photoresist Processing (track, coat, etc.) (41 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)
• Process Equipment: Software (operating, simulation, etc.) (35 companies)
• Process Equipment: Wet Etch (72 companies)
• Process Support Equipment/Materials/Services: 300-mm Components (66 companies)
• Process Support Equipment/Materials/Services: Automation/Robotics (74 companies)
• Process Support Equipment/Materials/Services: Heat Exchangers (33 companies)
• Process Support Equipment/Materials/Services: In Situ Cleaners (20 companies)
• Process Support Equipment/Materials/Services: In Situ Monitors (37 companies)
• Process Support Equipment/Materials/Services: Minienvironments, Automated (32 companies)
• Process Support Equipment/Materials/Services: Minienvironments, Manual (44 companies)
• Process Support Equipment/Materials/Services: Monitoring/Analysis Tools (87 companies)
• Process Support Equipment/Materials/Services: Parts Cleaning/Refurbishing Services (43 companies)
• Process Support Equipment/Materials/Services: Piping/Tubing, Other (76 companies)
• Process Support Equipment/Materials/Services: Piping/Tubing, Stainless Steel (50 companies)
• Process Support Equipment/Materials/Services: Positioning Systems/Components (46 companies)
• Process Support Equipment/Materials/Services: Power Supplies, Accessories (36 companies)
• Process Support Equipment/Materials/Services: Quartzware (21 companies)
• Process Support Equipment/Materials/Services: Vacuum Components (67 companies)
• Process Support Equipment/Materials/Services: Vacuum Pumps (58 companies)
• Process Support Equipment/Materials/Services: Vacuum Seals (O-rings, metal, etc.) (49 companies)
• Process Support Equipment/Materials/Services: Valves/Controllers (90 companies)
• Process Support Equipment/Materials/Services: Wafer Identification (18 companies)
• Robotics/Automation & Product Handling/Storage: 300-mm Systems (62 companies)
• Robotics/Automation & Product Handling/Storage: Automation, Interbay (24 companies)
• Robotics/Automation & Product Handling/Storage: Automation, Intrabay (track, AGV, etc.) (17 companies)
• Robotics/Automation & Product Handling/Storage: Carriers, Disks (12 companies)
• Robotics/Automation & Product Handling/Storage: Carriers, FPD (11 companies)
• Robotics/Automation & Product Handling/Storage: Carriers/Boats, Wafer (28 companies)
• Robotics/Automation & Product Handling/Storage: Carriers/Containers, Other (19 companies)
• Robotics/Automation & Product Handling/Storage: Conveyors (18 companies)
• Robotics/Automation & Product Handling/Storage: Fab Automation Systems (45 companies)
• Robotics/Automation & Product Handling/Storage: Loaders, Cassette (28 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Wet (35 companies)
• Robotics/Automation & Product Handling/Storage: Sensors (44 companies)
• Robotics/Automation & Product Handling/Storage: Software (control, scheduling, etc.) (32 companies)
• Robotics/Automation & Product Handling/Storage: Transport Systems (39 companies)
• Robotics/Automation & Product Handling/Storage: Wafer Sorters (23 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Batch (71 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: Electropolishing (20 companies)
• Surface Cleaning Equipment/Supplies: Megasonic/Ultrasonic Systems (68 companies)
• Surface Cleaning Equipment/Supplies: Parts Cleaning Systems (64 companies)
• Surface Cleaning Equipment/Supplies: Rinsers/Dryers (51 companies)
• Surface Cleaning Equipment/Supplies: Software (operating, simulation, etc.) (13 companies)
• Surface Cleaning Equipment/Supplies: Solvents (28 companies)
• Surface Cleaning Equipment/Supplies: Spin Processors (30 companies)
• Surface Cleaning Equipment/Supplies: Spray-Clean Systems (38 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Wet Process Stations (67 companies)