MICRO Buyers Guide Index

ProSys

1745 Dell Ave.
Campbell, CA 95008-6904
Tel: 408/871-2500
Fax: 408/871-2504

Web: http://www.prosysmeg.com
E-mail: info@prosysmeg.com

ProSys Megasonic cleaners provide process solutions for critical cleaning. ProSys delivers process performance and damage control with the enhanced control off Cavitation uniformity.

Systems are available standalone or components for single substrate through 300mm batch applications. Tank systems are designed for optimized fluid flow and Cavitation uniformity.

ProSys specializes in custom single wafer solutions. The MegPie is a single substrate Megasonic transducer that provides a uniform field of acoustic energy to the wafer surface. This Megasonic Transducer is easily integrated into your single substrate cleaning equipment. The MegPie is available in standard packages and configurations.

ProSys metrology tools help users understand and optimize their cleaning processes with our proprietary Megasonic Metrology equipment. The Probe measures the actual Cavitation energy in the process bath, allowing the user to optimize numerous factors that effect cleaning and damage.

The MicroProbe Cavitation Monitor for Ultrasonic and Megasonic baths is now fully portable, with the data gathering power of a PDA using ProSys custom software.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Wafermaking Equipment (crystal pullers, dicers) (21 companies)
• Process Equipment: Wet Etch (72 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Batch (71 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: Megasonic/Ultrasonic Systems (68 companies)
• Surface Cleaning Equipment/Supplies: Parts Cleaning Systems (64 companies)
• Surface Cleaning Equipment/Supplies: Post-CMP Cleaning Systems (47 companies)
• Surface Cleaning Equipment/Supplies: Post-Cu/Interconnect Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Wet Process Stations (67 companies)