MICRO Buyers Guide Index

MKS Instruments

90 Industrial Way
Wilmington, MA 01887-4610
Tel: 978/284-4000
Fax: 978/284-4999

Web: http://www.mksinst.com
E-mail: mks@mksinst.com

MKS Instruments, Inc. is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media and electro-optical products. Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers’ uptime, yield and throughput, and improving their productivity and return on invested capital.

MKS has extensive process expertise in the areas of materials flow, chemical composition, pressure and vacuum technology, power delivery, reactive gas generation and information management. By building this expertise into every MKS product and by combining products and technologies into integrated subsystems, MKS is able to provide best-in-class solutions that improve productivity and solve process challenges for its OEM and end-user customers. Our broad product portfolio includes: capacitance manometers and pressure transducers; pressure control valves; vacuum gauges; vacuum components and valves; mass flow controllers; gas analysis instruments; portable helium leak detectors; RF/DC/microwave power generators; reactive gas generators; digital I/O modules and serial gateways; and pressure and gas flow portable calibration systems.

In addition, MKS is anchored by organizational strength and renowned lean manufacturing, and offers complete localized technical support to customers around the world.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Advanced Process Control (34 companies)
• Analytical/Metrology Equipment/Services: Calibration Equipment/Supplies (72 companies)
• Analytical/Metrology Equipment/Services: Data Management Systems/Software (44 companies)
• Analytical/Metrology Equipment/Services: Endpoint Detectors (28 companies)
• Analytical/Metrology Equipment/Services: Gas Analyzers (RGAs, etc.) (68 companies)
• Analytical/Metrology Equipment/Services: Pressure/Temperature Monitors/Sensors (73 companies)
• Environmental, Health, and Safety Systems/Components/Services: Exhaust Gas Treatment Systems (39 companies)
• Environmental, Health, and Safety Systems/Components/Services: Leak Detectors (58 companies)
• Environmental, Health, and Safety Systems/Components/Services: Monitoring/Analysis Tools (70 companies)
• Environmental, Health, and Safety Systems/Components/Services: Piping/Tubing (68 companies)
• Environmental, Health, and Safety Systems/Components/Services: Process Tool Abatement Systems (13 companies)
• Environmental, Health, and Safety Systems/Components/Services: Toxic Gas Monitors (39 companies)
• Environmental, Health, and Safety Systems/Components/Services: Valves, Fittings, Quick Disconnects (81 companies)
• Fluids/Slurries and Delivery Systems: DI Water Systems (63 companies)
• Fluids/Slurries and Delivery Systems: Flowmeters (72 companies)
• Fluids/Slurries and Delivery Systems: Injection Systems (22 companies)
• Fluids/Slurries and Delivery Systems: Monitoring/Analysis Tools (52 companies)
• Fluids/Slurries and Delivery Systems: Piping/Tubing, Stainless Steel (46 companies)
• Fluids/Slurries and Delivery Systems: Valves (83 companies)
• Gases/Gas Delivery Systems: Chemical-to-Gas Generation Systems (13 companies)
• Gases/Gas Delivery Systems: Data Management Software (14 companies)
• Gases/Gas Delivery Systems: Filters, Filter Housings (50 companies)
• Gases/Gas Delivery Systems: Fittings, Quick-Disconnect Couplings (46 companies)
• Gases/Gas Delivery Systems: Mass-Flow Controllers, Analog (37 companies)
• Gases/Gas Delivery Systems: Mass-Flow Controllers, Digital (40 companies)
• Gases/Gas Delivery Systems: Monitoring/Analyis Tools (51 companies)
• Gases/Gas Delivery Systems: Piping/Tubing, Stainless Steel (57 companies)
• Gases/Gas Delivery Systems: Valves (76 companies)
• Process Support Equipment/Materials/Services: In Situ Cleaners (20 companies)
• Process Support Equipment/Materials/Services: In Situ Monitors (37 companies)
• Process Support Equipment/Materials/Services: Monitoring/Analysis Tools (87 companies)
• Process Support Equipment/Materials/Services: Piping/Tubing, Stainless Steel (50 companies)
• Process Support Equipment/Materials/Services: Power Supplies, Accessories (36 companies)
• Process Support Equipment/Materials/Services: Pressure Gauges (45 companies)
• Process Support Equipment/Materials/Services: Transducers (42 companies)
• Process Support Equipment/Materials/Services: Vacuum Components (67 companies)
• Process Support Equipment/Materials/Services: Vacuum Gauges (49 companies)
• Process Support Equipment/Materials/Services: Vacuum Seals (O-rings, metal, etc.) (49 companies)
• Process Support Equipment/Materials/Services: Valves/Controllers (90 companies)