MICRO Buyers Guide Index

Modutek

6387 San Ignacio Ave.
San Jose, CA 95119
Tel: 408/362-2000
Fax: 408/362-2001

E-mail: sales@modutek.com

Description:
Modutek offers megasonic cleaning systems. High-temperature bath lines include quartz, PFA-coated stainless steel, and PVDF models. All baths are available in filtered and static configurations. Nitride etch, HF, and BOE baths are available. The product line also includes ultrapure rinsers and neutralization systems. Complete field installaton for upgrading is available for all products.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Calibration Equipment/Supplies (72 companies)
• Cleanroom Components: Exhaust Controls (ducts, valves, etc.) (36 companies)
• Cleanroom Supplies and Equipment: Exhaust Hoods (58 companies)
• Environmental, Health, and Safety Systems/Components/Services: CMP Waste Treatment Systems/Components (35 companies)
• Environmental, Health, and Safety Systems/Components/Services: Fume Scrubbers, Wet (29 companies)
• Environmental, Health, and Safety Systems/Components/Services: Wastewater Treatment Systems (45 companies)
• Facility/System Design, Services: Process Automation Services (43 companies)
• Facility/System Design, Services: Waste Treatment Systems (45 companies)
• Fluids/Slurries and Delivery Systems: DI Water Heaters (34 companies)
• Fluids/Slurries and Delivery Systems: Dispensing Systems (61 companies)
• Fluids/Slurries and Delivery Systems: Injection Systems (22 companies)
• Fluids/Slurries and Delivery Systems: Monitoring/Analysis Tools (52 companies)
• Fluids/Slurries and Delivery Systems: Waste Treatment Systems (39 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)
• Process Equipment: Wet Etch (72 companies)
• Process Support Equipment/Materials/Services: Quartzware (21 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Batch (71 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: DI Water Heaters (30 companies)
• Surface Cleaning Equipment/Supplies: Megasonic/Ultrasonic Systems (68 companies)
• Surface Cleaning Equipment/Supplies: Post-CMP Cleaning Systems (47 companies)
• Surface Cleaning Equipment/Supplies: Rinsers/Dryers (51 companies)