MICRO Buyers Guide Index

Matrix Integrated Systems

4050 Lakeside Dr.
Richmond, CA 94806
Tel: 510/222-2727
Fax: 510/222-7817

E-mail: jmirza@gomatrix.com

Description:
Matrix provides high-throughput tools for ashing, dry strip, isotropic etch, and plasma cleaning for silicon, thin-film head, III-V, and flip-chip bumping processes. The tools process 50- to 300-mm wafers.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Dry-Clean Systems (gas-phase, etc.) (14 companies)
• Surface Cleaning Equipment/Supplies: Plasma Cleaning Systems (24 companies)
• Surface Cleaning Equipment/Supplies: Post-Cu/Interconnect Cleaning Systems (27 companies)