MICRO Buyers Guide Index

Legacy Systems

4466 Enterprise St.
Fremont, CA 94538-6315
Tel: 510/651-2312
Fax: 510/491-2900

E-mail: sherrymatthews@cs.com

Description:
Legacy Systems has been researching improvements and new techniques in semiconductor wet processing since 1989. A leader in innovative ozone technology for both dry and wet ozone processes, the company offers products that are process enabling, cost-effective, and environmentally safe.

Categories this company is listed under in the MICRO Buyers Guide:

• Environmental, Health, and Safety Systems/Components/Services: Oxidizers (5 companies)
• Fluids/Slurries and Delivery Systems: Chemical Generation/Mixing Systems (44 companies)
• Fluids/Slurries and Delivery Systems: Dispensing Systems (61 companies)
• Fluids/Slurries and Delivery Systems: Injection Systems (22 companies)
• Fluids/Slurries and Delivery Systems: Process Chemicals (40 companies)
• Fluids/Slurries and Delivery Systems: Reprocessors, Recirculation/Reclaim Systems (26 companies)
• Fluids/Slurries and Delivery Systems: Strippers (22 companies)
• Fluids/Slurries and Delivery Systems: UV Sterilizers (13 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Wet Etch (72 companies)
• Process Support Equipment/Materials/Services: In Situ Cleaners (20 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Batch (71 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: Parts Cleaning Systems (64 companies)
• Surface Cleaning Equipment/Supplies: Rinsers/Dryers (51 companies)
• Surface Cleaning Equipment/Supplies: Spray-Clean Systems (38 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Wet Process Stations (67 companies)