MICRO Buyers Guide Index

CyberOptics Semiconductor

13555 S.W. Millikan Way
Beaverton, OR 97005
Tel: 503/495-2200, 800/366-9131
Fax: 503/495-2201

E-mail: csinfo@cyberoptics.com

Description:
CyberOptics Semiconductor combines laser- and vision-based technologies to deliver compelling products to meet the needs of OEM customers in the semiconductor market. WaferSense ALS is a wireless, wafer-like sensor that can be placed in cassettes and FOUPs, on end effectors and aligners, and in loadlocks and process chambers to ensure that all stations are level and coplanar. Wafer-mapping sensors enable quick, reliable detection of semiconductor wafers in cassettes or FOUPs.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Wafer Mapping/Alignment (45 companies)
• Process Support Equipment/Materials/Services: Automation/Robotics (74 companies)
• Robotics/Automation & Product Handling/Storage: Fab Automation Systems (45 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Atmospheric (25 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Vacuum (24 companies)
• Robotics/Automation & Product Handling/Storage: Sensors (44 companies)