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FEI Beam Technology

5350 N.E. Dawson Creek Dr.
Hillsboro, OR 97124
Tel: 503/726-2520
Fax: 503/726-7808

E-mail: feibeamtech@feico.com

Description:
FEI Beam Technology Division manufactures and sells nanometer-resolution, UHV-compatible liquid metal ion and Schottky field emission electron focusing columns for microscopy. The columns are for use in Auger, SIMS, micromachining, and other surface science and semiconductor applications. The company also manufactures Schottky electron sources, liquid metal ion sources, and control electronics.

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