MICRO Buyers Guide Index

FEI

7451 N.W. Evergreen Pky.
Hillsboro, OR 97124
Tel: 503/640-7500
Fax: 503/844-2615

E-mail: sales@feico.com

Description:
Structural Process Management from FEI goes below the surface to reveal details about device structures and manufacturing processes. Cross-sections of new materials, including copper and low-k dielectrics, and root-cause analysis for subsurface particle and voltage contrast defects are performed. The company provides products that perform control processes in the fab with automated 3-D metrology and defect analysis for geometries to 0.13 µm and beyond.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: 300-mm Tools (95 companies)
• Analytical/Metrology Equipment/Services: Defect Detection/Inspection/Review (89 companies)
• Analytical/Metrology Equipment/Services: Failure Analysis (electrical test, etc.) (55 companies)
• Analytical/Metrology Equipment/Services: FIBs (11 companies)
• Analytical/Metrology Equipment/Services: Microscope Accessories (42 companies)
• Analytical/Metrology Equipment/Services: Microscopes, Probe (AFM, etc.) (25 companies)
• Analytical/Metrology Equipment/Services: Microscopes, SEM/TEM (33 companies)
• Analytical/Metrology Equipment/Services: Spectrometry/Spectroscopy (ICP-MS, APIMS, SIMS, etc.) (61 companies)
• Analytical/Metrology Equipment/Services: Surface Analysis/Inspection (106 companies)
• Analytical/Metrology Equipment/Services: Surface Metrology (ellipsometers, CD, overlay, etc.) (71 companies)
• Analytical/Metrology Equipment/Services: Testing/Analytical Services (104 companies)