MICRO Buyers Guide Index

Filmetrics

9335 Chesapeake Dr.
San Diego, CA 92123
Tel: 858/573-9300
Fax: 858/573-9400

E-mail: info@filmetrics.com

Description:
Filmetrics offers a full line of metrology equipment using noncontact reflectometry. Affordable systems are available to measure thickness, refractive index, absorption, and deposition rates of dielectric and semiconductor thin films. The new STMapper captures film thickness from every die in 5 seconds. This scanning technique also offers 100% wafer coverage for detecting residual metal and other process defects.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Defect Detection/Inspection/Review (89 companies)
• Analytical/Metrology Equipment/Services: Endpoint Detectors (28 companies)
• Analytical/Metrology Equipment/Services: FPD Inspection/Test (25 companies)
• Analytical/Metrology Equipment/Services: Surface Analysis/Inspection (106 companies)
• Analytical/Metrology Equipment/Services: Surface Metrology (ellipsometers, CD, overlay, etc.) (71 companies)