MICRO Buyers Guide Index

FSI International

3455 Lyman Blvd.
Chaska, MN 55318-3052
Tel: 952/448-5440
Fax: 952/448-2825

E-mail: fsi@fsi-intl.com

Description:
For more than 30 years, FSI has provided innovative, extendable, and cost-effective surface-conditioning solutions. The company’s broad portfolio of 200- and 300-mm immersion, spray, and CryoKinetic cleaning technologies are integral to microelectronics manufacturers’ process performance and productivity goals. World-class support is maintained by FSI teams that are strategically located near IC manufacturers around the globe.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Copper Systems (28 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)
• Process Equipment: Wet Etch (72 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Batch (71 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: DI Water Heaters (30 companies)
• Surface Cleaning Equipment/Supplies: Megasonic/Ultrasonic Systems (68 companies)
• Surface Cleaning Equipment/Supplies: Post-CMP Cleaning Systems (47 companies)
• Surface Cleaning Equipment/Supplies: Spin Processors (30 companies)
• Surface Cleaning Equipment/Supplies: Spray-Clean Systems (38 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Wet Process Stations (67 companies)