MICRO Buyers Guide Index

Ebara Technologies

51 Main Ave.
Sacramento, CA 95838
Tel: 916/920-5451
Fax: 916/920-0147

E-mail: aswanson@ebaratech.com

Description:
Ebara is a global innovator and local provider of vacuum technologies and advanced wafer-processing equipment serving the semiconductor industry. The company's products are backed by a worldwide sales and support network. Products include dry vacuum pumps, turbomolecular pumps, ozone systems, point-of-use abatement systems, airborne molecular chemical filters, chemical mechanical polishers, damascene metal plating and through-mask plating.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: 300-mm Tools (95 companies)
• Analytical/Metrology Equipment/Services: Defect Detection/Inspection/Review (89 companies)
• Analytical/Metrology Equipment/Services: Endpoint Detectors (28 companies)
• Analytical/Metrology Equipment/Services: Fluid/Slurry Analyzers (conductivity, pH, etc.) (31 companies)
• Analytical/Metrology Equipment/Services: Particle Counters, In Situ (18 companies)
• Analytical/Metrology Equipment/Services: Particle Size Analysis (41 companies)
• Analytical/Metrology Equipment/Services: Surface Analysis/Inspection (106 companies)
• Cleanroom Components: Filters, HEPA/ULTRA (82 companies)
• Environmental, Health, and Safety Systems/Components/Services: Abatement Systems (25 companies)
• Environmental, Health, and Safety Systems/Components/Services: Filters (58 companies)
• Environmental, Health, and Safety Systems/Components/Services: Fume Scrubbers, Dry (20 companies)
• Environmental, Health, and Safety Systems/Components/Services: Fume Scrubbers, Wet (29 companies)
• Environmental, Health, and Safety Systems/Components/Services: Pumps (54 companies)
• Environmental, Health, and Safety Systems/Components/Services: Valves, Fittings, Quick Disconnects (81 companies)
• Gases/Gas Delivery Systems: Pumps (29 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Chemical-Mechanical Polishing (CMP) (43 companies)
• Process Equipment: Copper Systems (28 companies)
• Process Equipment: Electrofilling/Electroplating (25 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)
• Process Equipment: Software (operating, simulation, etc.) (35 companies)
• Process Support Equipment/Materials/Services: 300-mm Components (66 companies)
• Process Support Equipment/Materials/Services: Automation/Robotics (74 companies)
• Process Support Equipment/Materials/Services: Ceramic Accessories (22 companies)
• Process Support Equipment/Materials/Services: CMP Consumables (36 companies)
• Process Support Equipment/Materials/Services: In Situ Cleaners (20 companies)
• Process Support Equipment/Materials/Services: In Situ Monitors (37 companies)
• Process Support Equipment/Materials/Services: Piping/Tubing, Other (76 companies)
• Process Support Equipment/Materials/Services: Pressure Gauges (45 companies)
• Process Support Equipment/Materials/Services: Vacuum Components (67 companies)
• Process Support Equipment/Materials/Services: Vacuum Pumps (58 companies)
• Robotics/Automation & Product Handling/Storage: 300-mm Systems (62 companies)
• Robotics/Automation & Product Handling/Storage: Microenclosure (SMIF pods, FOUP, etc.) (17 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Atmospheric (25 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Wet (35 companies)
• Robotics/Automation & Product Handling/Storage: Sensors (44 companies)
• Robotics/Automation & Product Handling/Storage: Storage Boxes, Wafer (14 companies)
• Robotics/Automation & Product Handling/Storage: Transport Systems (39 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Brushes, Pads, Rollers (23 companies)
• Surface Cleaning Equipment/Supplies: Cleaning Systems, Single Wafer (71 companies)
• Surface Cleaning Equipment/Supplies: Megasonic/Ultrasonic Systems (68 companies)
• Surface Cleaning Equipment/Supplies: Non-CFC Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Post-CMP Cleaning Systems (47 companies)
• Surface Cleaning Equipment/Supplies: Rinsers/Dryers (51 companies)
• Surface Cleaning Equipment/Supplies: Software (operating, simulation, etc.) (13 companies)
• Surface Cleaning Equipment/Supplies: Solvents (28 companies)
• Surface Cleaning Equipment/Supplies: Spin Processors (30 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)
• Surface Cleaning Equipment/Supplies: Wet Process Stations (67 companies)