MICRO Buyers Guide Index

Ulvac Technologies

401 Griffin Brook Park Dr.
Methuen, MA 01844
Tel: 978/686-7550
Fax: 978/689-6301

E-mail: evan_sohm@ulvac.com

Description:
ULVAC Technologies manufactures an extensive line of small and midsized rotary-vane and dry-vacuum pumps. Direct-drive, oil-sealed rotary-vane pumps and miniature dc-drive vacuum pumps are available, along with dry-vacuum pumps in diaphragm, rocking-piston, and rotary-vane styles. Ancillary products include a line of digital vacuum gauges as well as compact, portable Heliot helium mass spectrometer leak detectors, which combine rapid start-up and high sensitivity with long-term reliability and economy.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Copper Systems (28 companies)
• Process Equipment: Deposition (CVD, PVD, etc.) (67 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Furnaces (35 companies)
• Process Equipment: Ion Implantation (all types) (23 companies)
• Process Equipment: Photoresist Stripping/Ashing (58 companies)
• Process Equipment: Process Equipment, Disk (69 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)