MICRO Buyers Guide Index

Philips Advanced Metrology

12 Michigan Dr.
Natick, MA 01760
Tel: 508/647-1169
Fax: 508/647-1111

E-mail: steve.kohnle@philips.com

Description:
Philips Advanced Metrology Systems is a wholly owned business unit of Philips Electronics. The company manufactures high-throughput noncontact metal film-thickness and high-aspect-ratio trench measurement tools for on-line monitoring of semiconductor processes.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: 300-mm Tools (95 companies)
• Analytical/Metrology Equipment/Services: Advanced Process Control (34 companies)
• Analytical/Metrology Equipment/Services: Defect Detection/Inspection/Review (89 companies)
• Analytical/Metrology Equipment/Services: Imaging Equipment/Cameras (10 companies)
• Analytical/Metrology Equipment/Services: Microscopes, SEM/TEM (33 companies)
• Analytical/Metrology Equipment/Services: Surface Analysis/Inspection (106 companies)
• Analytical/Metrology Equipment/Services: Surface Metrology (ellipsometers, CD, overlay, etc.) (71 companies)
• Analytical/Metrology Equipment/Services: Yield Management Software (36 companies)