MICRO Buyers Guide Index

Surface Technology Systems

Imperial Park
Newport, NP10 8UJ UK
Tel: +44 1633 654702
Fax: +44 1633 652405

E-mail: enquiries@stsystems.co.uk

Description:
Surface Technology Systems is a supplier of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with inductively coupled plasma, reactive ion etch, XeF₂, and CVD sources. Products include the ASE deep-silicon etch process for MEMS micromachining; dielectric etch and deposition for optical waveguides; and GaAs, InP, and GaN etch processes.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Deposition (CVD, PVD, etc.) (67 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)