MICRO Buyers Guide Index

Modular Process Technology

2233 Paragon Dr.
San Jose, CA 95131
Tel: 408/325-8640
Fax: 408/325-8649

E-mail: mamenetto@modularpro.com

Description:
Modular Process Technology supplies advanced RTP process products for silicon, compound semiconductor, integrated photonics, and MEMS device manufacturing. The RTP-600S, a compact benchtop system, and the RTP-800S, an advanced stand-alone system, are multigas systems for R&D and pilot line production. The RTP-3000, configured either as a dual-susceptor autoload system or a standard silicon processing tool for wafers up to 300-mm, offers excellent process performance and a low cost of ownership.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Furnaces (35 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)