MICRO Buyers Guide Index

Primaxx

7377 William Ave., Ste. 800
Allentown, PA 18106
Tel: 610/336-0314
Fax: 610/336-0455

E-mail: phammond@primaxxinc.com

Description:
Primaxx produces cluster tools for depositing and thermal processing thin films for the semiconductor and related industries. The company has made breakthrough developments in depositing ferroelectric, high-k, and low-k films using its liquid source misted chemical deposition (LSMCD) process. The company also has introduced a dry, stiction-free MEMS etch release system.

Categories this company is listed under in the MICRO Buyers Guide:

• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Deposition (CVD, PVD, etc.) (67 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Process Equipment, Other Thin Films (90 companies)
• Surface Cleaning Equipment/Supplies: 300-mm Systems (62 companies)
• Surface Cleaning Equipment/Supplies: Dry-Clean Systems (gas-phase, etc.) (14 companies)
• Surface Cleaning Equipment/Supplies: UV Ozone Cleaning Systems (27 companies)