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Donaldson

1400 W. 94th St., P.O. Box 1299
Minneapolis, MN 55440-1299
Tel: 952/887-3930
Fax: 952/887-3612

Web: http://www.lithoguard.com
E-mail: semiconductor@mail.donaldson.com



Donaldson filters help you control airborne molecular contamination at all levels during semiconductor processing — ZONE/TOOL/POU! Donaldson ChemCore filters protect entire work zones. Our Lithoguard cabinets, with rechargeable carbon filters, remove gas-phase chemistry at the tool level. And our full line of POU (point of use) filters offers multiple-reaction, ultra-clean protection, positioned exactly where you need it. Rely on Donaldson for filters & filtration systems for reticle and wafer stages, nitrogen purge lines, reticle containers and stockers, wafer carriers, and pellicle venting.

Donaldson is global, with regional headquarters Minnesota, USA, Brussels, Belgium and Singapore. See contact information on our website.


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