MICRO Buyers Guide Index

Abakus Software

Manfred-von-Ardenne-Ring 7
Dresden, D-01099 Germany
Tel: +49 351 884830
Fax: +49 351 8848330

E-mail: info@abakus-soft.de

Description:
Abakus provides products and services for semiconductor manufacturers and process equipment suppliers. The company offers products for process control for equipment and modules (MES, cluster tools), material movement and tracking, recipe management (SEMI E42), equipment integration (SECS, GEM, CORBA), equipment tracking (ARAMS, OEE), and seamless metrology integration.

Categories this company is listed under in the MICRO Buyers Guide:

• Facility/System Design, Services: Fab Automation Systems (28 companies)
• Facility/System Design, Services: Process Automation Services (43 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Chemical-Mechanical Polishing (CMP) (43 companies)
• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Deposition (CVD, PVD, etc.) (67 companies)
• Process Equipment: Dry Etch (56 companies)
• Process Equipment: Photoresist Processing (track, coat, etc.) (41 companies)
• Process Equipment: Software (operating, simulation, etc.) (35 companies)
• Process Equipment: Wet Etch (72 companies)
• Process Support Equipment/Materials/Services: Monitoring/Analysis Tools (87 companies)
• Robotics/Automation & Product Handling/Storage: Fab Automation Systems (45 companies)
• Robotics/Automation & Product Handling/Storage: Software (control, scheduling, etc.) (32 companies)
• Surface Cleaning Equipment/Supplies: Software (operating, simulation, etc.) (13 companies)