MICRO Buyers Guide: Surface Cleaning Equipment/Supplies: Post-CMP Cleaning Systems

Enhanced listings:

• BOC Edwards, Wilmington, MA, 800/848-9800
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920
• ProSys, Campbell, CA, 408/871-2500

All listings:

• Akrion, Allentown, PA, 610/391-9200, 888/363-8113
• Applied Materials TFG, Sunnyvale, CA, 408/986-7683
• Astro Pak, Downey, CA, 562/803-3400, 800/743-5444
• Beltec Sales, Newberg, OR, 503/554-8421
• BL Enterprises, Angels Camp, California, 209/736-0684
• BOC Edwards, Wilmington, MA, 800/848-9800
• Bold Technologies, West Jordan, UT, 801/568-7300
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• Dainippon Screen Electronics (DNS Electronics), Sunnyvale, CA, 408/523-9140
• Daitron, Wilsonville, OR, 503/682-7560, 888/324-8766
• DuPont Teflon, Wilmington, DE, 302/999-4390
• Ebara Technologies, Sacramento, CA, 916/920-5451
• Eco-Snow Systems, Livermore, CA, 925/606-2000
• EKC Technology (DuPont Electronic Technologies), Hayward, CA, 510/784-9105, 800/EKC-TECH
• FSI International, Chaska, MN, 952/448-5440
• Group T, San Jose, CA, 408/281-4544
• GT Equipment Technologies, Nashua, NH, 603/883-5200
• Imtec Acculine, Sunnyvale, CA, 408/745-7800
• Interlab, Danbury, CT, 203/748-5624
• Kinetico Engineered Systems, Newbury, OH, 440/564-5397, 800/633-5530
• Kinetics, Union City, CA, 510/675-6000
• Kyzen, Nashville, TN, USA, 615/831-0888, 800/845-5524
• Lam Research, Fremont, CA, 510/659-0200
• MB Silicon Process, Loomis, CA, 916/521-9698
• Medtronic Merocel, Mystic, CT, 860/572-5100, 800/637-6235
• Metara, Sunnyvale, CA, 408/331-5221
• Metronics Semiconductor Equipment, Weichs, Germany, +49 8136 808866
• Modutek, San Jose, CA, 408/362-2000
• Nano-Master, Austin, TX, 512/385-4552, 888/217-7180
• Noel Technologies, Campbell, CA, 408/374-9549, ext. 16
• Oliver Design, Scotts Valley, CA, 831/438-0701
• Owens Design, Fremont, CA, 510/770-8479
• PCT Systems, Fremont, CA, 510/657-4412
• Planar Semiconductor, Kingston, NY, 845/336-5405
• Polypros, Roseville, CA, 916/786-7000
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920
• ProSys, Campbell, CA, 408/871-2500
• Sagitta, Hauppauge, NY, 631/952-9440
• Semiconductor Process Equipment Corp. (SPEC), Valencia, CA, 661/257-0934
• Semitool, Kalispell, MT, 406/752-2107
• Service Support Specialties, Montville, NJ, 973/263-0640
• SEZ Group, Villach, Austria, 602/453-5058
• Shibatec, Shibaura Technology International, Santa Clara, CA, 408/626-7900
• Solid State Equipment, Horsham, PA, 215/328-0700
• TBW Industries, Furlong, PA, 215/794-8070
• Valtech, Pottstown, PA, 610/705-5900
• Yarbrough Southwest, Dallas, TX, USA, 972/690-0800