MICRO Buyers Guide: Process Support Equipment/Materials/Services: In Situ Cleaners

Enhanced listings:

• MKS Instruments, Wilmington, MA, 978/284-4000
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920

All listings:

• Anatech LTD., Denver, NC, 704/489-1488, 800/752-7629
• ATMI, San Jose, CA, 408/526-9400
• Cleanroom Limited, Div. of Nano Times, Suwon City/Gyong Gi-Do, South Korea, +82 31 2123706
• Daitron, Wilsonville, OR, 503/682-7560, 888/324-8766
• Ebara Technologies, Sacramento, CA, 916/920-5451
• Group T, San Jose, CA, 408/281-4544
• Hyperflo, Gilbert, AZ, 480/813-1110, 800/281-3179
• Imtec Acculine, Sunnyvale, CA, 408/745-7800
• Legacy Systems, Fremont, CA, 510/651-2312
• Mantis Deposition, Thame, Oxfordshire, +44 1844 260160
• Metronics Semiconductor Equipment, Weichs, Germany, +49 8136 808866
• Millennium Automation, Fremont, CA, 510/683-5942
• MKS Instruments, Wilmington, MA, 978/284-4000
• Nano-Master, Austin, TX, 512/385-4552, 888/217-7180
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920
• Silicon Services Consortium, Austin, TX, 512/389-0433
• Silicon Valley Sales, Gilroy, CA, 408/398-9604
• SPI Supplies, West Chester, PA, 610/436-5400, 800/2424-SPI
• Superior Automation, San Jose, CA, 408/227-4898
• Valtech, Pottstown, PA, 610/705-5900