MICRO Buyers Guide: Process Equipment

• 300-mm Systems (123 companies)
• Chemical-Mechanical Polishing (CMP) (43 companies)
• Cluster Tools (49 companies)
• Copper Systems (28 companies)
• Deposition (CVD, PVD, etc.) (67 companies)
• Diffusion/Oxidation/Annealing (RTP, etc.) (41 companies)
• Dry Etch (56 companies)
• Electrofilling/Electroplating (25 companies)
• Epitaxy (24 companies)
• Equipment Auction Services (1 companies)
• Furnaces (35 companies)
• Ion Implantation (all types) (23 companies)
• Lithography, DUV steppers/scanners (20 companies)
• Lithography, g- and I-line steppers/scanners (21 companies)
• Lithography, nonoptical (x-ray, etc.) (15 companies)
• Photomasking Equipment (E-beam, etc.) (27 companies)
• Photoresist Processing (track, coat, etc.) (41 companies)
• Photoresist Stripping/Ashing (58 companies)
• Process Equipment, Disk (69 companies)
• Process Equipment, FPD (75 companies)
• Process Equipment, Other Thin Films (90 companies)
• Software (operating, simulation, etc.) (35 companies)
• Wafermaking Equipment (crystal pullers, dicers) (21 companies)
• Wet Etch (72 companies)