MICRO Buyers Guide: Process Equipment: Photoresist Stripping/Ashing

• Adtec Plasma Technology, Hiroshima, Japan, +81 084 9451300
• Akrion, Allentown, PA, 610/391-9200, 888/363-8113
• Amerimade Technology, Livermore, CA, 925/243-9090, 800-WET-ETCH
• Anatech LTD., Denver, NC, 704/489-1488, 800/752-7629
• APT, Fremont, CA, 510/770-9100
• AST Products, Billerica, MA, 978/667-4500, 877/667-4500
• Axcelis Technologies, Beverly, MA, 978/787-4000
• Axic, Santa Clara, CA, 408/980-0240, 800/4-PLASMA
• Better Process Systems, Pleasanton, CA, 888/988-6633
• BL Enterprises, Angels Camp, California, 209/736-0684
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• ClassOne Equipment, Decatur, GA, 770/808-8708
• Connell Technologies, Livermore, CA, 925/455-6790
• Creative Design, Montville, NJ, 973/263-0640
• DuPont Teflon, Wilmington, DE, 302/999-4390
• Foresight Processing, Tempe, AZ, 480/966-8180
• FSI International, Chaska, MN, 952/448-5440
• GE Capital The Source, Santa Clara, CA, 408/980-7700, 800/722-7719
• Group T, San Jose, CA, 408/281-4544
• GT Equipment Technologies, Nashua, NH, 603/883-5200
• HYAC, Fremont, CA, 510/623-0700
• Imtec Acculine, Sunnyvale, CA, 408/745-7800
• Interlab, Danbury, CT, 203/748-5624
• Jelight, Irvine, CA, 949/380-8774
• Legacy Systems, Fremont, CA, 510/651-2312
• Macrotron Scientific Engineering, D-82008 Unterhaching b. München, Germany, +49 8945 1110
• Malema Flow Sensors, Boca Raton, FL, 561/995-0595, 800/637-6418
• Matrix Integrated Systems, Richmond, CA, 510/222-2727
• Mattson Technology, Fremont, CA, 510/657-5900, 800/MATTSON
• MB Silicon Process, Loomis, CA, 916/521-9698
• Modutek, San Jose, CA, 408/362-2000
• Novellus Systems, San Jose, CA, 408/943-9700
• Plasma Etch, Carson City, NV, 775/883-1336
• Plasmatic Systems, North Brunswick, NJ, 732/297-9107
• Polypros, Roseville, CA, 916/786-7000
• PVA TePla America, Corona, CA, 800/527-5667
• Samco International, Sunnyvale, CA, 408/734-0459
• Semiconductor Process Equipment Corp. (SPEC), Valencia, CA, 661/257-0934
• Semitool, Kalispell, MT, 406/752-2107
• SEZ Group, Villach, Austria, 602/453-5058
• Shibatec, Shibaura Technology International, Santa Clara, CA, 408/626-7900
• Silicon Services Consortium, Austin, TX, 512/389-0433
• Silicon Valley Sales, Gilroy, CA, 408/398-9604
• SITE Services, Santa Clara, CA, 408/980-1155
• Solid State Equipment, Horsham, PA, 215/328-0700
• Sono-Tek, Milton, NY, 845/795-2020
• Spares Semiconductor, Austin, TX, 512/933-1100
• STS, Kibbutz Netiv HaLamed He, Israel, +972 2 9922268
• Superior Automation, San Jose, CA, 408/227-4898
• Suss MicroTec, Waterbury Center, VT, 802/244-5181
• Tegal, Petaluma, CA, 707/763-5600, 800/828-3425
• TEL, Austin, TX, 512/424-1000, 800/558-6596
• Tokyo Electron America, Austin, TX, 800/828-6596
• Trio-Tech, Van Nuys, CA, 818/787-7000
• Ultra t Equipment, Fremont, CA, 510/440-3900
• Ulvac Technologies, Methuen, MA, 978/686-7550
• Wafer Inspection Services.com, Orleans, MA, 508/240-7195
• Yield Engineering Systems, San Jose, CA, 408/954-8353, 888/YES-3637