MICRO Buyers Guide: Process Equipment: Lithography, DUV steppers/scanners

• Accent Optical Technologies, Bend, OR, 541/322-2500
• Aerotech, Pittsburgh, PA, 412/963-7470
• Anvik, Hawthorne, NY, 914/345-2442
• ASML, Tempe, AZ, 480/383-4422, 800/227-6462
• Azores, Wilmington, MA, 978/253-6200
• BL Enterprises, Angels Camp, California, 209/736-0684
• Brooks Automation, Chelmsford, MA, 978/262-2400
• Canon USA, San Jose, CA, 408/468-2000
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• ClassOne Equipment, Decatur, GA, 770/808-8708
• Connell Technologies, Livermore, CA, 925/455-6790
• Foresight Processing, Tempe, AZ, 480/966-8180
• GE Capital The Source, Santa Clara, CA, 408/980-7700, 800/722-7719
• ICOM Mechanical, San Jose, CA, 408/792-2200, 800/464-4266
• Lydall Thermal Solutions, Ossipee, NH, 603/539-3600
• Macrotron Scientific Engineering, D-82008 Unterhaching b. München, Germany, +49 8945 1110
• Nikon Precision, Belmont, CA, 650/508-4674, 800/446-4566
• Sico Technology, A-9530 Bad Bleiberg, Austria, +43 4244 5151
• Ultratech, San Jose, CA, 408/321-8835
• Wafer Inspection Services.com, Orleans, MA, 508/240-7195