MICRO Buyers Guide: Process Equipment: Dry Etch

Enhanced listings:

• Garlock Helicoflex—Performance Sealing Technologies, Folsom, CA, 408/316-9215

All listings:

• Abakus Software, Dresden, Germany, +49 351 884830
• Adtec Plasma Technology, Hiroshima, Japan, +81 084 9451300
• Alcatel Vacuum Products, Hingham, MA, 781/331-4200
• Anatech LTD., Denver, NC, 704/489-1488, 800/752-7629
• Applied Materials Corporate, Santa Clara, CA, 408/727-5555
• AST Products, Billerica, MA, 978/667-4500, 877/667-4500
• Axic, Santa Clara, CA, 408/980-0240, 800/4-PLASMA
• Beltec Sales, Newberg, OR, 503/554-8421
• BL Enterprises, Angels Camp, California, 209/736-0684
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• CETAC Technologies, Omaha, NE, 402/733-2829
• ClassOne Equipment, Decatur, GA, 770/808-8708
• Connell Technologies, Livermore, CA, 925/455-6790
• Daikin America, Orangeburg, NY, 845/365-9500, 800/365-9570
• Eptam Plastics, Northfield, NH, 603/286-8009, 800/775-1306
• Foresight Processing, Tempe, AZ, 480/966-8180
• Futurestar, Bloomington, MN, 952/942-8388
• Garlock Helicoflex—Performance Sealing Technologies, Folsom, CA, 408/316-9215
• Gatan, Pleasanton, CA, 925/463-0200
• GE Capital The Source, Santa Clara, CA, 408/980-7700, 800/722-7719
• Hitachi High Technologies America, Dallas, TX, USA, 877/ECR-ETCH
• ICOM Mechanical, San Jose, CA, 408/792-2200, 800/464-4266
• Jelight, Irvine, CA, 949/380-8774
• Jusung Engineering, Kwangju-Si, Kyunggi-Do, South Korea, +82 31 7607000
• Lam Research, Fremont, CA, 510/659-0200
• LTD Ceramics, Newark, CA, 510/789-2222
• March Plasma Systems, Concord, CA, 925/827-1240
• Matrix Integrated Systems, Richmond, CA, 510/222-2727
• Mattson Technology, Fremont, CA, 510/657-5900, 800/MATTSON
• Metron Technology, San Jose, CA, 408/719-4600
• Nano-Master, Austin, TX, 512/385-4552, 888/217-7180
• Noel Technologies, Campbell, CA, 408/374-9549, ext. 16
• Omnisafe, Culver City, CA, 310/838-8321
• Plasma Etch, Carson City, NV, 775/883-1336
• Plasmatech, Erlanger, KY, 859/647-0730
• Primaxx, Allentown, PA, 610/336-0314
• PVA TePla America, Corona, CA, 800/527-5667
• Redwood MicroSystems, Menlo Park, CA, 650/617-1200, 800/888-8283
• Samco International, Sunnyvale, CA, 408/734-0459
• Semicore Equipment, Livermore, CA, 925/373-8201
• Shibatec, Shibaura Technology International, Santa Clara, CA, 408/626-7900
• Silicon Services Consortium, Austin, TX, 512/389-0433
• Spares Semiconductor, Austin, TX, 512/933-1100
• STS, Kibbutz Netiv HaLamed He, Israel, +972 2 9922268
• Surface Technology Systems, Newport, UK, +44 1633 654702
• Tegal, Petaluma, CA, 707/763-5600, 800/828-3425
• Theis Enterprises, Tempe, AZ, 480/966-4040
• Tokyo Electron America, Austin, TX, 800/828-6596
• Tru-Si Technologies, Sunnyvale, CA, 408/720-3333
• Ulvac Technologies, Methuen, MA, 978/686-7550
• Unaxis Wafer Processing, St. Petersburg, FL, 727/577-4999
• Veeco Instruments, Woodbury, NY, 516/677-0200
• Wafer Inspection Services.com, Orleans, MA, 508/240-7195
• Wolfe Engineering, Sunnyvale, CA, 408/617-6300
• Yarbrough Southwest, Dallas, TX, USA, 972/690-0800
• Yield Engineering Systems, San Jose, CA, 408/954-8353, 888/YES-3637