MICRO Buyers Guide: Process Equipment: Diffusion/Oxidation/Annealing (RTP, etc.)

• A-Vac Industries, Anaheim, CA, 714/938-1300, 800/747-2821
• Applied Materials Corporate, Santa Clara, CA, 408/727-5555
• ASM International, Bilthoven, The Netherlands, +31 30 2298411
• Aviza Technology, Scotts Valley, CA, 831/438-2100
• Axcelis Technologies, Beverly, MA, 978/787-4000
• Axic, Santa Clara, CA, 408/980-0240, 800/4-PLASMA
• Beltec Sales, Newberg, OR, 503/554-8421
• Better Process Systems, Pleasanton, CA, 888/988-6633
• BL Enterprises, Angels Camp, California, 209/736-0684
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• ClassOne Equipment, Decatur, GA, 770/808-8708
• Connell Technologies, Livermore, CA, 925/455-6790
• Foresight Processing, Tempe, AZ, 480/966-8180
• GE Capital The Source, Santa Clara, CA, 408/980-7700, 800/722-7719
• Integrated Control Concepts (ICCI), Hollis, NH, 603/889-8922
• Integrated Materials, Sunnyvale, CA, 408/437-7591
• Jusung Engineering, Kwangju-Si, Kyunggi-Do, South Korea, +82 31 7607000
• LTD Ceramics, Newark, CA, 510/789-2222
• Mantis Deposition, Thame, Oxfordshire, +44 1844 260160
• Mattson Technology, Fremont, CA, 510/657-5900, 800/MATTSON
• McNeal Enterprises, San Jose, CA, 408/922-7290
• MGI Electronics, Tempe, AZ, 480/967-8011, 800/835-7378
• Mott, Farmington, CT, 860/747-6333, 800/289-6688
• MRL Industries, Sonora, CA, 209/533-1990
• Noel Technologies, Campbell, CA, 408/374-9549, ext. 16
• Norcimbus, Phoenix, AZ, 602/437-8500
• Redwood MicroSystems, Menlo Park, CA, 650/617-1200, 800/888-8283
• Rohm and Haas, Advanced Materials, Woburn, MA, 781/933-9243, 800/552-2283
• Semicore Equipment, Livermore, CA, 925/373-8201
• Silicon Services Consortium, Austin, TX, 512/389-0433
• STS, Kibbutz Netiv HaLamed He, Israel, +972 2 9922268
• Superior Automation, San Jose, CA, 408/227-4898
• TEL, Austin, TX, 512/424-1000, 800/558-6596
• Tokyo Electron America, Austin, TX, 800/828-6596
• Tystar, Torrance, CA, 310/781-9219
• Ultratech, San Jose, CA, 408/321-8835
• United Silica Products, Franklin, NJ, 973/209-8854
• Wafer Process Systems, San Jose, CA, 408/445-3010
• WaferMasters, San Jose, CA, 408/451-0850
• Wolfe Engineering, Sunnyvale, CA, 408/617-6300
• Yarbrough Southwest, Dallas, TX, USA, 972/690-0800