MICRO Buyers Guide: Process Equipment: Cluster Tools

• Abakus Software, Dresden, Germany, +49 351 884830
• Applied Materials Corporate, Santa Clara, CA, 408/727-5555
• Applied Materials TFG, Sunnyvale, CA, 408/986-7683
• APT, Fremont, CA, 510/770-9100
• ASM International, Bilthoven, The Netherlands, +31 30 2298411
• Aviza Technology, Scotts Valley, CA, 831/438-2100
• Axic, Santa Clara, CA, 408/980-0240, 800/4-PLASMA
• BL Enterprises, Angels Camp, California, 209/736-0684
• Brewer Science, Rolla, MO, 573/364-0300, ext. 2101
• Brooks Automation, Chelmsford, MA, 978/262-2400
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• Connell Technologies, Livermore, CA, 925/455-6790
• Creative Design, Montville, NJ, 973/263-0640
• DuPont Teflon, Wilmington, DE, 302/999-4390
• EV Group, Tempe, AZ, 480/727-9600
• FAS Technologies, Dallas, TX, 214/343-5300
• Foresight Processing, Tempe, AZ, 480/966-8180
• GE Capital The Source, Santa Clara, CA, 408/980-7700, 800/722-7719
• Genus, Sunnyvale, CA, 408/747-7120
• Imtec Acculine, Sunnyvale, CA, 408/745-7800
• Jusung Engineering, Kwangju-Si, Kyunggi-Do, South Korea, +82 31 7607000
• KDF Electronic & Vacuum Services, Rockleigh, NJ, 201/784-5005
• Lam Research, Fremont, CA, 510/659-0200
• LC-Tec, Brunswick, OH, 330/220-0514
• LTD Ceramics, Newark, CA, 510/789-2222
• Mantis Deposition, Thame, Oxfordshire, +44 1844 260160
• Nordiko USA, Santa Clara, CA
• Novellus Systems, San Jose, CA, 408/943-9700
• NuTool, Milpitas, CA, 408/586-9500
• Primaxx, Allentown, PA, 610/336-0314
• Semicore Equipment, Livermore, CA, 925/373-8201
• Semitool, Kalispell, MT, 406/752-2107
• Service Support Specialties, Montville, NJ, 973/263-0640
• Silicon Services Consortium, Austin, TX, 512/389-0433
• Solid State Equipment, Horsham, PA, 215/328-0700
• Solitec Wafer Processing, Milpitas, CA, 408/955-9939, 800/648-4040
• Spares Semiconductor, Austin, TX, 512/933-1100
• Sputtered Films, Santa Barbara, CA, 805/963-9651
• Strasbaugh, San Luis Obispo, CA, 805/541-6424
• Surface Technology Systems, Newport, UK, +44 1633 654702
• Suss MicroTec, Waterbury Center, VT, 802/244-5181
• Tegal, Petaluma, CA, 707/763-5600, 800/828-3425
• TEL, Austin, TX, 512/424-1000, 800/558-6596
• Tokyo Electron America, Austin, TX, 800/828-6596
• Ultra t Equipment, Fremont, CA, 510/440-3900
• Ulvac Technologies, Methuen, MA, 978/686-7550
• Unaxis Wafer Processing, St. Petersburg, FL, 727/577-4999
• Veeco Instruments, Woodbury, NY, 516/677-0200
• Wafer Inspection Services.com, Orleans, MA, 508/240-7195