MICRO Buyers Guide: Process Equipment: 300-mm Systems

Enhanced listings:

• Garlock Helicoflex—Performance Sealing Technologies, Folsom, CA, 408/316-9215
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920
• ProSys, Campbell, CA, 408/871-2500

All listings:

• Abakus Software, Dresden, Germany, +49 351 884830
• Accent Optical Technologies, Bend, OR, 541/322-2500
• Adtec Plasma Technology, Hiroshima, Japan, +81 084 9451300
• Adventa Control Technologies, Plano, TX, 972/543-1754
• Aerotech, Pittsburgh, PA, 412/963-7470
• Air Control, Henderson, NC, 252/492-2300
• Akrion, Allentown, PA, 610/391-9200, 888/363-8113
• Amerimade Technology, Livermore, CA, 925/243-9090, 800-WET-ETCH
• Anatech LTD., Denver, NC, 704/489-1488, 800/752-7629
• Anvik, Hawthorne, NY, 914/345-2442
• Applied Materials Corporate, Santa Clara, CA, 408/727-5555
• Applied Materials TFG, Sunnyvale, CA, 408/986-7683
• ASM International, Bilthoven, The Netherlands, +31 30 2298411
• ASML, Tempe, AZ, 480/383-4422, 800/227-6462
• Aviza Technology, Scotts Valley, CA, 831/438-2100
• Axic, Santa Clara, CA, 408/980-0240, 800/4-PLASMA
• Beltec Sales, Newberg, OR, 503/554-8421
• Better Process Systems, Pleasanton, CA, 888/988-6633
• BL Enterprises, Angels Camp, California, 209/736-0684
• Bold Technologies, West Jordan, UT, 801/568-7300
• Brewer Science, Rolla, MO, 573/364-0300, ext. 2101
• Brooks Automation, Chelmsford, MA, 978/262-2400
• Capovani Brothers Equipment for Science and Industry, Scotia, New York, 518/346-8347
• Cimetrix, Salt Lake City, UT, 801/256-6500
• ClassOne Equipment, Decatur, GA, 770/808-8708
• Creative Design, Montville, NJ, 973/263-0640
• Daikin America, Orangeburg, NY, 845/365-9500, 800/365-9570
• Dainippon Screen Electronics (DNS Electronics), Sunnyvale, CA, 408/523-9140
• Daitron, Wilsonville, OR, 503/682-7560, 888/324-8766
• Dakota Systems, Dracut, MA, 978/275-0601
• DMS–Dynamic Micro Systems, D-78315 Radolfzell, Germany, +49 7732 94090
• Ebara Technologies, Sacramento, CA, 916/920-5451
• ECI Technology, East Rutherford, NJ, 973/773-8686
• Electro Scientific Industries, Portland, OR, 503/641-4141, 800/547-5746
• Eptam Plastics, Northfield, NH, 603/286-8009, 800/775-1306
• EV Group, Tempe, AZ, 480/727-9600
• FAS Technologies, Dallas, TX, 214/343-5300
• Fluoro Mechanic, Edogawa-Ku, Tokyo, Japan, +81 3 36180368
• Foresight Processing, Tempe, AZ, 480/966-8180
• Fortrend Engineering, Sunnyvale, CA, 408/734-9311
• FSI International, Chaska, MN, 952/448-5440
• Garlock Helicoflex—Performance Sealing Technologies, Folsom, CA, 408/316-9215
• Genmark Automation, Milpitas, CA, 408/678-8500
• Genus, Sunnyvale, CA, 408/747-7120
• Goldfinger Technologies, a wholly owned subsidiary of Akrion, Santa Ana, CA, 714/445-2000
• Group T, San Jose, CA, 408/281-4544
• H & L Instruments, North Hampton, NH, 603/964-1818
• Hitachi High Technologies America, Dallas, TX, USA, 877/ECR-ETCH
• Hyperflo, Gilbert, AZ, 480/813-1110, 800/281-3179
• Imtec Acculine, Sunnyvale, CA, 408/745-7800
• Integrated Materials, Sunnyvale, CA, 408/437-7591
• Interlab, Danbury, CT, 203/748-5624
• Interserv, Bloomington, MN, 952/888-9767, 800/445-2738
• Jusung Engineering, Kwangju-Si, Kyunggi-Do, South Korea, +82 31 7607000
• KDF Electronic & Vacuum Services, Rockleigh, NJ, 201/784-5005
• Kinemetric Engineering, Laguna Hills, CA, 949/348-1213
• Lam Research, Fremont, CA, 510/659-0200
• Laurell Technologies, North Wales, PA, 215/699-7278
• Legacy Systems, Fremont, CA, 510/651-2312
• Leica Microsystems, Allendale, NJ, 201/236-5900, 800/909-3935
• Lin Engineering, Santa Clara, CA, 408/919-0200
• Lockwood Greene, Spartanburg, SC, 864/578-2000, 888/LOCKWOOD (562-5966)
• LTD Ceramics, Newark, CA, 510/789-2222
• Macrotron Scientific Engineering, D-82008 Unterhaching b. München, Germany, +49 8945 1110
• Malema Flow Sensors, Boca Raton, FL, 561/995-0595, 800/637-6418
• Matrix Integrated Systems, Richmond, CA, 510/222-2727
• MB Silicon Process, Loomis, CA, 916/521-9698
• McNeal Enterprises, San Jose, CA, 408/922-7290
• MGI Electronics, Tempe, AZ, 480/967-8011, 800/835-7378
• Modular Process Technology, San Jose, CA, 408/325-8640
• Modutek, San Jose, CA, 408/362-2000
• MRL Industries, Sonora, CA, 209/533-1990
• Nano-Master, Austin, TX, 512/385-4552, 888/217-7180
• Nanometrics, Milpitas, CA, 408/435-9600, 800/955-6266
• Nikon Precision, Belmont, CA, 650/508-4674, 800/446-4566
• Novellus Systems, San Jose, CA, 408/943-9700
• NuTool, Milpitas, CA, 408/586-9500
• Oliver Design, Scotts Valley, CA, 831/438-0701
• Omnisafe, Culver City, CA, 310/838-8321
• Owens Design, Fremont, CA, 510/770-8479
• PCT Systems, Fremont, CA, 510/657-4412
• PEER Group, Kitchener, ON, Canada N2G 4Y9, 519/749-9554
• Planar Semiconductor, Kingston, NY, 845/336-5405
• Polypros, Roseville, CA, 916/786-7000
• PPB–Ultrasonic & Megasonic Meters, San Diego, CA, 619/544-1920
• Precise Sensors, Monrovia, CA, 626/358-4578, 800/423-7123
• Primaxx, Allentown, PA, 610/336-0314
• ProSys, Campbell, CA, 408/871-2500
• PVA TePla America, Corona, CA, 800/527-5667
• Recif Technologies, F-31840 Aussonne, France, +33 825 834747
• Redwood MicroSystems, Menlo Park, CA, 650/617-1200, 800/888-8283
• Rigaku International, Tokyo, Japan, +81 3 34796012
• Rofin-Baasel, Boxborough, MA, 978/635-9100
• SCP Global Technologies, Boise, ID, 208/685-5000
• Semiconductor Process Equipment Corp. (SPEC), Valencia, CA, 661/257-0934
• Semicore Equipment, Livermore, CA, 925/373-8201
• SemiNet Automation, Valencia, CA, 661/295-8686
• Semitool, Kalispell, MT, 406/752-2107
• Service Support Specialties, Montville, NJ, 973/263-0640
• SEZ Group, Villach, Austria, 602/453-5058
• Shibatec, Shibaura Technology International, Santa Clara, CA, 408/626-7900
• Sico Technology, A-9530 Bad Bleiberg, Austria, +43 4244 5151
• Silicon Services Consortium, Austin, TX, 512/389-0433
• Silicon Valley Sales, Gilroy, CA, 408/398-9604
• SITE Services, Santa Clara, CA, 408/980-1155
• Solid State Equipment, Horsham, PA, 215/328-0700
• Solitec Wafer Processing, Milpitas, CA, 408/955-9939, 800/648-4040
• Sono-Tek, Milton, NY, 845/795-2020
• Superior Automation, San Jose, CA, 408/227-4898
• Suss MicroTec, Waterbury Center, VT, 802/244-5181
• Tamarack Scientific, Corona, CA, 951/817-3700
• TEL, Austin, TX, 512/424-1000, 800/558-6596
• Tokyo Electron America, Austin, TX, 800/828-6596
• Trio-Tech, Van Nuys, CA, 818/787-7000
• Tru-Si Technologies, Sunnyvale, CA, 408/720-3333
• Ultra t Equipment, Fremont, CA, 510/440-3900
• Ulvac Technologies, Methuen, MA, 978/686-7550
• Unaxis Wafer Processing, St. Petersburg, FL, 727/577-4999
• Varian Semiconductor Equipment Associates, Gloucester, MA, 978/282-2410, 800/447-1762
• Wafer Inspection Services.com, Orleans, MA, 508/240-7195
• Wafer Process Systems, San Jose, CA, 408/445-3010
• Yarbrough Southwest, Dallas, TX, USA, 972/690-0800
• Yield Engineering Systems, San Jose, CA, 408/954-8353, 888/YES-3637