MICRO Buyers Guide: Fluids/Slurries and Delivery Systems: Slurry Delivery Systems (CMP)

Enhanced listings:

• BOC Edwards, Wilmington, MA, 800/848-9800
• Entegris, Chaska, MN, 952/556-3131

All listings:

• Air Liquide America, Dallas, TX, 972/301-5200
• Air Liquide Electronics Systems, Echirolles, France, +33 4 38 49 88 00
• Air Products and Chemicals, Allentown, PA, 800/654-4567, 610/706-4730
• Amerimade Technology, Livermore, CA, 925/243-9090, 800-WET-ETCH
• ATMI Packaging, Minneapolis, MN, 952/942-0855, 800/966-6698
• Beltec Sales, Newberg, OR, 503/554-8421
• Better Process Systems, Pleasanton, CA, 888/988-6633
• BOC Edwards, Wilmington, MA, 800/848-9800
• Celerity, Milpitas, CA, 408/946-3100
• Chemical Safety Technology, San Jose, CA, 408/263-0984
• Colder Products, St. Paul, MN, 651/645-0091, 800/945-3814
• Custom Fab Solutions, Chanhassen, MN, 952/227-6604
• DuPont Teflon, Wilmington, DE, 302/999-4390
• Entegris, Chaska, MN, 952/556-3131
• Fluid Metering, Syosset, NY, 800/223-3388
• GEMU Valves, Atlanta, GA, 404/344-8970
• ICOM Mechanical, San Jose, CA, 408/792-2200, 800/464-4266
• J. L. White Technical Sales/White Seal Div., Santa Clara, CA, 408/441-2040
• Kanto, Portland, OR, 503/283-0405
• Kinetics, Union City, CA, 510/675-6000
• KNF Neuberger, Trenton, NJ, 609/890-8600
• Macrotron Scientific Engineering, D-82008 Unterhaching b. München, Germany, +49 8945 1110
• MB Silicon Process, Loomis, CA, 916/521-9698
• McMillan, Georgetown, TX, 512/863-0231, 800/861-0231
• McNeal Enterprises, San Jose, CA, 408/922-7290
• Meacon, Portland, OR, 503/654-3366
• Merck Electronic Chemicals, D-64293 Darmstadt, Germany, +49 6151 720
• Mykrolis, Billerica, MA, 978/436-6500
• Nano-Master, Austin, TX, 512/385-4552, 888/217-7180
• Nisshin Gulf Coast (NGC), Houston, TX, 713/691-1193, 800/642-4615
• Polypros, Roseville, CA, 916/786-7000
• Redwood MicroSystems, Menlo Park, CA, 650/617-1200, 800/888-8283
• Rohm and Haas Electronic Materials, CMP Technologies, Phoenix, AZ, 602/431-0500, 800/522-3990
• Saint-Gobain Performance Plastics, Garden Grove, CA, 714/630-5818, 800/833-5661
• Semiconductor Process Equipment Corp. (SPEC), Valencia, CA, 661/257-0934
• Silicon Valley Sales, Gilroy, CA, 408/398-9604
• Solvay Solexis, Thorofare, NJ, 856/853-8119, 800/323-2874
• USFilter, Warrendale, PA, 800/525-0658, 724/772-1402
• Vanton Pump, Hillside, NJ, 908/688-4216
• Wolfe Engineering, Sunnyvale, CA, 408/617-6300
• Yamada America, West Chicago, IL, 630/231-4083, 800/990-7867
• Yarbrough Southwest, Dallas, TX, USA, 972/690-0800