MICRO Buyers Guide: Environmental, Health, and Safety Systems/Components/Services: Process Tool Abatement Systems

Enhanced listings:

• BOC Edwards, Wilmington, MA, 800/848-9800
• Lighthouse Worldwide Solutions, San Jose, CA, 408/228-9200
• MKS Instruments, Wilmington, MA, 978/284-4000

All listings:

• Air Liquide America, Dallas, TX, 972/301-5200
• Air Liquide Electronics Systems, Echirolles, France, +33 4 38 49 88 00
• AMC Technologies, St. Louis, MO, 314/726-9969, 888/644-9969
• ATMI, San Jose, CA, 408/526-9400
• BOC Edwards, Wilmington, MA, 800/848-9800
• Chemical Equipment Technology, Los Gatos, CA, 408/356-5080, 775/884-4995
• CIC Photonics, Albuquerque, NM, 505/343-9500
• Duall Div., Met-Pro, Owosso, MI, 989/725-8184
• Hitachi High Technologies America, Dallas, TX, USA, 877/ECR-ETCH
• Lighthouse Worldwide Solutions, San Jose, CA, 408/228-9200
• Misonix, Farmingdale, NY, 631/694-9555, 800/645-9846
• MKS Instruments, Wilmington, MA, 978/284-4000
• TFI, Fremont, CA, 510/770-8700