MICRO Buyers Guide Index

Brooks Automation

15 Elizabeth Dr.
Chelmsford, MA 01824
Tel: 978/262-2400
Fax: 978/262-2500

Description:
Brooks offers automation products. The company's hardware, software, and services can manage every wafer, reticle, and data movement in the fab, helping semiconductor manufacturers to accelerate the time to market while reducing their risk. The company's products are used in virtually every fab in the world.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Advanced Process Control (34 companies)
• Process Equipment: 300-mm Systems (123 companies)
• Process Equipment: Cluster Tools (49 companies)
• Process Equipment: Lithography, DUV steppers/scanners (20 companies)
• Process Equipment: Lithography, g- and I-line steppers/scanners (21 companies)
• Process Equipment: Process Equipment, FPD (75 companies)
• Process Equipment: Software (operating, simulation, etc.) (35 companies)
• Robotics/Automation & Product Handling/Storage: 300-mm Systems (62 companies)
• Robotics/Automation & Product Handling/Storage: Automation, Interbay (24 companies)
• Robotics/Automation & Product Handling/Storage: Automation, Intrabay (track, AGV, etc.) (17 companies)
• Robotics/Automation & Product Handling/Storage: Fab Automation Systems (45 companies)
• Robotics/Automation & Product Handling/Storage: Loaders, Cassette (28 companies)
• Robotics/Automation & Product Handling/Storage: Microenclosure (SMIF pods, FOUP, etc.) (17 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Atmospheric (25 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Vacuum (24 companies)
• Robotics/Automation & Product Handling/Storage: Robotics, Wet (35 companies)
• Robotics/Automation & Product Handling/Storage: Software (control, scheduling, etc.) (32 companies)
• Robotics/Automation & Product Handling/Storage: Stockers, Wafer (17 companies)
• Robotics/Automation & Product Handling/Storage: Stockers/Sorters, Reticle (16 companies)