MICRO Buyers Guide Index

Acton Research

15 Discovery Way
Acton, MA 01720
Tel: 978/263-3584
Fax: 978/263-5086

E-mail: mail@acton-research.com

Description:
Acton Research provides the CAMS-507 DUV spectrophotometer for reflectance, transmission, and absorption measurements of reticles, wafers, resists, and optics at 193 and 157 nm. The company also produces superior 157- and 193-nm optics and coatings for semiconductor lithography and metrology systems.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: Reticle Inspection Systems (23 companies)
• Analytical/Metrology Equipment/Services: Spectrometry/Spectroscopy (ICP-MS, APIMS, SIMS, etc.) (61 companies)