MICRO Buyers Guide Index

ADE

80 Wilson Way
Westwood, MA 02090-1806
Tel: 781/467-3500
Fax: 781/461-0500

E-mail: sales@ade.com

Description:
ADE offers production inspection and measurement equipment for semiconductor and MRAM process control; silicon, epitaxial, SOI, and SiGe wafer manufacturing; and magnetic data-storage production. Applications include dishing and erosion for copper CMP, wafer flatness and shape, nanotopography, defect inspection on film and bare wafers, SOI and dieletric film mapping, and magnetic film properties.

Categories this company is listed under in the MICRO Buyers Guide:

• Analytical/Metrology Equipment/Services: 300-mm Tools (95 companies)
• Analytical/Metrology Equipment/Services: Advanced Process Control (34 companies)
• Analytical/Metrology Equipment/Services: Data Management Systems/Software (44 companies)
• Analytical/Metrology Equipment/Services: Defect Detection/Inspection/Review (89 companies)
• Analytical/Metrology Equipment/Services: Surface Analysis/Inspection (106 companies)
• Analytical/Metrology Equipment/Services: Surface Metrology (ellipsometers, CD, overlay, etc.) (71 companies)
• Analytical/Metrology Equipment/Services: Wafer Mapping/Alignment (45 companies)
• Analytical/Metrology Equipment/Services: Yield Management Software (36 companies)