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ASML nabs GaAs client

The special applications division of ASML has sold an i-line stepper to a customer that produces GaAs devices for the wireless communications market. Alpha Industries of Woburn, MA, purchased a PAS 5500/100 system for an undisclosed sum. The first-time customer noted that the ASML division has a track record for serving the gallium arsenide market. ASML launched the business unit in April 1998 to target customers in the GaAs and other leading-edge semiconductor markets. The PAS 5500/100 accommodates linewidths >=0.4 µm.

AMD lauds Lam CMP tool

AMD has bought several Teres CMP systems from Lam Research for its Fab 25 in Austin, TX. The order includes Lam's post-CMP cleaning system. AMD will use the equipment for manufacturing its Athlon processor, taking advantage of the Teres's 0.18-µm shallow-trench isolation capability. The chipmaker will install additional systems for advanced CMP processes at its Submicron Development Center in Sunnyvale, CA.

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