INDUSTRY NEWS

EXPANSIONS AND ACQUISITIONS

Brooks talks up Infab buy

Brooks Automation says its proposed purchase of Jenoptik Infab of Jena, Germany, will create a company with an extensive global reach in semiconductor tool automation, MES software, and equipment interface systems. The Chelmsford, MA­based fab automation provider plans to open an Infab factory interface subsidiary. The company also expects to integrate Infab's software offerings with Brooks's existing factory and MES software groups. It further plans to combine the international businesses of both companies. Completed by means of a stock purchase, the acquisition is set for completion by the end of September. At the time of the July 12 announcement, the purchase price was undisclosed pending agreement on definitive terms.

Brooks says Infab took in approximately $36 million in U.S. revenues in 1998. The acquisition gives Brooks access to the factory interface market and solidifies Infab's position in factory-wide integration. Infab invented the front-opening unified pod (FOUP) for wafer handling, and it manufactures 300-mm FOUP loadport modules. If consummated, the deal would also give Brooks access to new OEM customers such as Applied Materials, ASML, and KLA-Tencor, the company says. Under the terms of the proposed purchase, Juergen Giessmann, president and CEO of M+W Zander Holding, Infab's former parent company, will be nominated a director of Brooks.

In related news, Brooks is in the process of purchasing Smart Machines. The San Jose­based company manufactures direct-drive Scara arm robots for use in metrology, inspection, lithography, track, and furnace systems. The acquisition will broaden Brooks's commercial reach into the markets for atmospheric process tool and noncluster vacuum tool applications for 200- and 300-mm wafer processing. Smart will continue to operate from San Jose.

FSI divests chemical unit

Heeding an industry trend, FSI International has sold its chemical management division to BOC Edwards in order to focus on process technology products. BOC will pay approximately $38 million for the unit. BOC Edwards produces and supplies bulk and process gases, abatement systems, slurry systems, gas cabinets, and site management services. The acquisition suits BOC Edwards's business strategy following the company's acquisition of Systems Chemistry from Submicron Systems two years ago. The company will integrate the FSI unit into its chemical management systems and gas equipment products division. FSI says the trend in the semiconductor industry is toward materials management services offered through alliances by gas and chemical companies. The divestiture will allow it to concentrate on operating its surface conditioning and microlithography divisions, the company adds.

Center focuses on NGL

IBM and Photronics have opened a center dedicated to developing advanced photomask technology for deep-submicron ICs. Located at IBM's site in Burlington, VT, the Mask Center of Competency will be used to further the commercial development of next-generation lithography (NGL) solutions. Its efforts will include crosscutting development of extreme-UV, ion projection beam, and x-ray as well as e-beam projection technologies such as Lucent Technologies's Scalpel system. The center will focus on data preparation, mask writing, processing, metrology, and defect detection and repair. In addition, the partners will collaborate on issues related to wafer productivity and the use of masks.

Headquartered in Jupiter, FL, Photronics will manage the projects. A portion of the center's budget, which was not disclosed, will come from U.S. government funds received by Photronics. IBM has expertise in x-ray lithography, while Photronics develops process technologies for subwavelength reticles and manufactures e-beam masks. The partners hope the center's work will help ensure that "when optical technologies finally do become exhausted, alternative means of patterning wafers" will be available, says Jack Moneta, senior vp of business development for Photronics.

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