Digital Microscope
Seiwa Optical
Pearl River, NY
A digital microscope is compatible with IBM and Macintosh computers and can download and transfer images through the Internet. No eyepiece is required to use the instrument, which combines a microscope, an LCD, and a digital camera in one unit. The microcope is available in two versions. Model 1 offers 0.75-to-4.5x lens magnification and accommodates transmitted and incident light. Model 2 features a quadruple nosepiece and 4x, 10x, 20x, and 40x lens magnification. Both models contain a 2-in. color LCD and a 1/3-in. progressive CCD camera with a resolution of 640 x 480 pixels.
Gas Valves
Veriflo
Richmond, CA
Designed for use with 300-mm integrated gas systems, Surface Mount 945 valves and SQ Micro point-of-use regulators feature bottom inlets and outlets for mounting on a substrate at 11/2-in. spacing. The surface-mount technology enables engineers to interchange valves, regulators, filters, and transducers within the gas delivery system. It also eliminates the need for welds and fittings and can reduce space requirements by up to 50%. C, Z, and W seals can be supplied in the surface-mount format.
Wafer Inspection System
August Technology
Edina, MN
The NSX-80 minimizes the need for manual second-pass optical inspection of processed wafers, increasing inspection throughput by a factor of 5 to 10. Capable of performing automated inspection, the instrument rapidly inspects all die and reports defects down to 0.5 µm. The system's inspection platform accommodates 300-mm wafers. The platform can be configured to handle whole wafers, sawed wafers on film frame, dies in gel packs, dies in waffle packs, JEDEC trays, Auer boats, and MCMs. The menu-based software is built around Windows NT 4.0+ to permit installation of user-defined data management software. Wafer maps can be imported and exported for integrating the system with production equipment such as pick-and-place robots.
Gas Analyzers
Stanford Research Systems
Sunnyvale, CA
CIS series closed ion gas analyzers provide a detection limit of 1 ppm for all gases and direct sampling at millitorr pressure. On-line process monitoring, control, purity verification, and residual gas analysis can be performed in real time using a Windows-based program. Mass range is 
300 amu. The analyzers are programmable and also feature multiple-head operation.
Laser Cutting System
New Wave Research
Sunnyvale, CA
The EzLaze laser cutting system features single-shot pulse repetition rates of 1 or 5 Hz for semiconductor failure analysis, design verification, LCD repair, and micromachining applications. Mounted on the Mitutoyo FS60 or A-Zoom microscopes, the instrument produces uniform, repeatable cuts ranging from 1 x 1 to 50 x 50 µm. A switch allows operators to choose from wavelengths of 1064, 532, and 355 nm, depending on the application. A PCLaze Windows interface permits users to select the laser's cut size and Laser-Macros enables the user to store and recall commonly used settings.
Cleanroom Lighting
Lightolier
Fall River, MA
Designed for cleanroom use, Cleanguard luminaires incorporate nonhygroscopic wiring to eliminate atmospheric moisture. The luminaires are sealed between the plenum and the fixture to prevent transfer of contaminants, and they contain no gaskets or similar materials that peel or flake. The cleanable lighting comes in lay-in-grid and flanged styles with housing assemblies of either 20-gauge cold-rolled steel or 20-gauge 304 stainless steel. Surface box, corner mount, surface wraparound, and teardrop luminaires are also available. The one-piece door frames feature welded corners and beveled edges. Sizes range from 2 x 24 to 2 x 96 in. for teardrop models and from 1 x 4 to 2 x 4 ft for flanged, lay-in-grid, surface box, and corner mount styles.
Copper Control System
Parker Systems
Ontario, CA
Designed for copper electroplating processes, the PS2000 CuCS-DD system can control the composition of the pre- and posttreatment baths used in damascene and dual-damascene wafer processing. The on-line, automatic system measures 72 x 30 x 24 in. and offers an autotuner that provides closed-loop control. Paced replenishment rates are based on analytical results. This feature enables small, ongoing chemical replenishment and solution maintenance that can be automatically checked and adjusted for sulfuric acid, chloride, brightener, copper, and leveler.
Polymer Removers
Silicon Valley Chemlabs
Sunnyvale, CA
Prx-400 strippers are designed to dissolve hardened inorganic polymers from DPS, TCP, and ECR etchers up to three times faster than conventional strippers. The chemicals operate at temperatures of 30° to 50°C and provide wide process latitude. They can be used in standard plasma etch proceses for aluminum interconnects as well as for copper and low-k dielectric dual-damascene applications. The formulations are free of hydroxylamine, phenols, phenol derivatives, ethylene, propylene glycols, HF, NH4F, and high-alkaline solutions. They will not attack soft metals such as copper, aluminum, titanium, and tungsten. No modifications to installed process tools are required. All strippers are shipped in low-particulate containers.
300-mm Wafer Cleaners
Polypros
Roseville, CA
The Microclean 960 series systems are suitable for cleaning 300-mm wafers and other large substrates, including flat-panel displays up to 1000 x 1000 mm. The tools come in a megasonic configuration using a high operating fre- quency that causes liquid to oscillate close to the substrate surface. This level of agitation removes particles down to 0.05 µm. An ultrasonic configuration is also available. All the units employ high-temperature piezobonding technology to handle temperatures 
120°C. The systems' process baths can be made of PFA, ECTFE, PVDF, quartz, or 316 stainless steel.
Flowmeters
Fluidyne
Longmont, CO
Two models of Hydro-Flow 2300 insertion vortex flowmeters feature a microprocessor-based piezoresistive vortex sensor with no moving parts to cause contamination or maintenance problems. Made of corrosion-resistant PVDF, Model 2300-A is designed for use with acids, ultrapure water, and solvents. The Ultem Model 2300-B is suitable for DI-water use. The meters measure water flow by detecting the frequency at which vortices are shed from a bluff body, which is at a rate directly proportional to the flow velocity. The sensor enables the meters to accurately measure liquid flow at rates as low as 0.3 ft/sec.
Return to page one of Product Allstars
MicroHome |
Search | Current Issue | MicroArchives
Buyers Guide | Media Kit
Questions/comments about MICRO Magazine? E-mail us at cheynman@gmail.com.
© 2007 Tom Cheyney
All rights reserved.
-cm resistivity and remove particles