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Koreans choose VG tool

VG Elemental has received orders from two South Korean companies for its Axiom high-resolution ICP-MS. Samsung is one of the companies purchasing the analysis system. Dongwoo Pure Chemicals, a manufacturer of semiconductor-grade acids, also has ordered an Axiom. In contrast to conventional quadrupole-based ICP-MS systems, the compact Axiom provides high power to resolve spectral interference from analytes of importance and guarantees better detection limits.

TI strikes deal with FSI

Texas Instruments has purchased P4400 slurry blending and distribution systems from FSI International for use at two TI facilities in Dallas. TI will use the P4400 units for both tungsten and oxide slurry in the manufacture of digital signal processing devices. The systems use FSI's vacuum pressure transfer technology and employ a Venturi vacuum that fills the vessels and humidified high-purity nitrogen that dispenses the chemical.

In other news, the surface conditioning division of FSI has closed a $1.9 million sale of single-wafer systems to a major worldwide semiconductor device manufacturer. The order follows the completion of successful evaluations of the tools in the customer's fab. The purchase includes Aries CryoKinetic and Excalibur vapor cleaning systems.

Eaton sells RTP system

With the first sales of its Summit rapid thermal processing system, Eaton Thermal Processing Systems will introduce its product to the North American and European markets. Designed to process wafers up to 300 mm, the Summit RTP provides a range of process capabilities, including silicidation, implant anneal, oxide growth, and BPSG reflow. The tools are scheduled to be delivered during the third and fourth quarters.

Samsung taps Air Products

Samsung Electronics has contracted Air Products and Chemicals to provide its Megasys total gas management services at Samsung's fab in Austin, TX. Under the long-term agreement, Air Products and a joint venture partner will manage and supply Samsung's bulk liquid nitrogen, argon, hydrogen, oxygen and specialty gas requirements; an on-site nitrogen plant; and gas handling materials, equipment, and operating services. The Austin fab is Samsung's first outside of Korea.

Fairchild gets ionized

Fairchild Semiconductor has installed an ionization system developed by Ion Systems at its 6001 fab in South Portland, ME. Fairchild contracted Ion Systems to install its latest ionization system to address static charge issues within its fab. Fairchild says the ionization system, which helps control static charges and prevents equipment lockup, will help it maximize the utilization of fab assets.

Hyundai chooses Applied tool

Hyundai has selected Applied Materials' CVD dielectric antireflective coating (DARC) process technology for 64-Mb DRAM manufacturing at its Fab 6 in Ichon, South Korea. DxZ Centura systems with CVD DARC technology have been installed in Hyundai's high-volume line. In its third year in production, the DARC process is used by more than 30 semiconductor manufacturing companies worldwide, according to Applied.

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