INDUSTRY NEWS

Semicon West 97 standards schedule

Standards meetings for Semicon West 97 will be held at the San Francisco Marriott, except Test, Assembly, and Packaging meetings, which will take place at the San Jose Hilton Friday, July 18. The following listing is organized by division title, date, and time. Information was correct at press time. Participants should check the final schedule information on-site for meeting locations and last-minute changes. For further information on standards activities, call SEMI at 415/940-6905 or Semifax at 415/938-9378, or check SEMI OnLine at http://www.semi.org.

INTERDIVISIONAL MEETINGS

SUNDAY, JULY 13

8 a.m.­5 p.m.

International Regional Standards Committee planning meeting

5:30­9:30 p.m.

North American Regional Standards Committee

MONDAY, JULY 14

8:30 a.m.­12:30 p.m.

North American Regional Standards Committee

5:30­6:30 p.m.

North American Regional Standards Committee leadership meeting (all leaders encouraged to attend)

TUESDAY, JULY 15

Noon­1 p.m.

Leadership training (all leaders invited)

6:30 p.m.­8:30 p.m.

Reception and awards presentation (all standards members invited)

WEDNESDAY, JULY 16

7­9 a.m.

Technical Editors Board

Noon­5 p.m.

International Standards Committee

FACILITIES AND SAFETY DIVISION

SUNDAY, JULY 13

6­8 p.m.

Liquid Chemical System Definition, Certification, and Design Task Force

MONDAY, JULY 14

7­9 a.m.

Pipe Labeling Task Force

Liquid Chemical Distribution Subcomponents Task Force

7­10 a.m.

Ultrapure Water Task Force

7 a.m.­Noon

S8 Revision Task Force

8­10 a.m.

Minienvironments Task Force

APIMS Task Force

9­11:30 a.m.

Liquid Chemical Packaging Task Force

9 a.m.­Noon

Environmental, Health, and Safety (EHS) of Liquid Chemical Distribution Task Force

10 a.m.­Noon

Components Task Force

Regulator Task Force

Noon­1:30 p.m.

TEOS Task Force

1­3 p.m.

Purifiers Task Force

Cost of Corrosion Workshop

Particles Task Force

Liquid Chemicals Distribution System Subcommittee

1­4 p.m.

Surface Measurement Task Force

1:30­4:30 p.m.

Decontamination (Doc. 2385) Task Force

3­5 p.m.

Facilities and Safety Division Leadership Meeting

Gas Purification Cost of Ownership Workshop Oxygen Task Force

5­7 p.m.

Gas Panel Test Methods Task Force

TUESDAY, JULY 15

7­9 a.m.

F4 Revision Task Force

Corrosion Task Force

7 a.m.­3 p.m.

Process Chemicals Committee

8­11 a.m.

Fire Protection Working Group

8 a.m.­Noon

Tool Emission Testing Task Force

9 a.m.­Noon

Safety and Health Subcommittee

9 a.m.­1 p.m.

Contamination in Gas Distribution Systems Subcommittee

Noon­1 p.m.

Process Chemicals Bar Code/EDI Task Force

Noon­1:30 p.m.

Statistical Methods Task Force

1­3 p.m.

Gas Detectors Task Force

Environmental Subcommittee

1­5 p.m.

S8 Revision Task Force

2­5 p.m.

Stainless Steel/F19 Task Force

Valve Flow Coefficient Task Force

3­5 p.m.

Gases Committee

3­5:30 p.m.

MFCs Task Force

5­6:30 p.m.

Calibration of APIMS Workshop

WEDNESDAY, JULY 16

8­10 a.m.

Human Software Interface Task Force

8­11 a.m.

S1 Revision Task Force

8 a.m.­Noon

Components of Gas Distribution Systems Subcommittee

S2 Leadership Task Force

12:30­3:30 p.m.

EHS Committee

1­4 p.m.

Tool Accommodation Subcommittee

3:30­5:30 p.m.

S2 Companion­Based Design Standard Task Force

4­7 p.m.

Facilities Committee

THURSDAY, JULY 17

8 a.m.­5 p.m.

S2 Revision Workshop

FACTORY INTEGRATION DIVISION

MONDAY, JULY 14

8­10 a.m.

Shared Object Library Task Force

Wafer Box Label Task Force

8 a.m.­5 p.m.

300-mm Wafer Carriers Task Force

E36 SEED Task Force

8:30­11:30 a.m.

ISEM Task Force

SAB Network Communications Task Force

X-Ray Mask Task Force

8:30 a.m.­Noon

Mass-Flow Controller (MFC) Device Model Task Force

10 a.m.­5 p.m.

QAEDI Task Force

1­4 p.m.

Next-Generation Pellicle Task Force

1­5 p.m.

Metrology Scanning Electron Microscope (SEM) Task Force

Pressure Controller Task Force

1:30­4:30 p.m.

Standards Costs and Benefits Task Force

1:30­5 p.m.

OBEM Task Force

TUESDAY, JULY 15

8­10 a.m.

Photoresist Model Parameter Measurement Task Force

8 a.m.­Noon

Carriers Subcommittee

Indirect Vacuum Gauges Task Force

8:30­11:30 a.m.

EGEM Task Force

Chip Traceability and Lead Frame Marking Task Force

Object Communications Task Force

Cluster Tool Productivity Task Force

9 a.m.­Noon

Order Entry Task Force

10 a.m.­Noon

Grid Artifacts and Calibrations Task Force

1­3:30 p.m.

Stepper SEM Task Force

Electrical Overlay Task Force

300-mm Cart-to-Tool Docking Interface Task Force

Software Reliability Task Force

1­5 p.m.

Reticle Carriers Task Force

1:30­4:30 p.m.

Electrostatic Discharge (ESD)

Task Force Equipment Data Collection Task Force

1:30­5 p.m.

Traceability Committee

2­5 p.m.

Capacitance Manometer Device Model Task Force

3:30­5:30 p.m.

Apply, Develop, Track SEM Task Force

Equipment Utilization/Reliability Task Force

3:30­6 p.m.

Electrical Critical Dimension (CD) Test Structures Task Force

4:30­6:30 p.m.

Physical Interfaces and Carriers Workshop

WEDNESDAY, JULY 16

8 a.m.­Noon

Combined Sensor Bus Task Forces

Next Reticle Size Task Force

8 a.m.­12:30 p.m.

Equipment Footprint and Height Task Force

8:30­11:30 a.m.

Handler/Tester SEM Task Force

Metrics Committee

Order Entry Task Force

8:30 a.m.­4:30 p.m.

Computer Integrated Manufacturing (CIM) Framework Planning Task Force

1­4:30 p.m.

Microlithography Committee

1­5 p.m.

Sensor Bus Subcommittee

300-mm E15 Task Force

1:30­4:30 p.m.

Wire Bonder SEM Task Force

Recipe Management Task Force

Human/Computer Interface Task Force

6­9 p.m.

FID Leadership and Technical Architects Board

THURSDAY, JULY 17

8:30 a.m.­4:30 p.m.

Information and Control Committee

Physical Interfaces and Carriers Committee

MATERIALS DIVISION

MONDAY, JULY 14

8 a.m.­Noon

300-mm Wafer Workshop

1­ 4 p.m.

300-mm Wafer Specification Task Force

4­6 p.m.

Texture/Microroughness Task Force

TUESDAY, JULY 15

8­10 a.m.

M18 Revision Task Force

8 a.m.­Noon

Chemical Mechanical Polishing (CMP) Process Metrics Task Force

8:30­11:30 a.m.

Statistical Specifications Task Force

8:30 a.m.­2 p.m.

Flat Panel Display Committee

10 a.m.­Noon

Automated Wafer Surface Inspection Task Force

1­3 p.m.

Reclaim Wafer Subcommittee

1­4 p.m.

Advanced Wafer Geometry Task Force

1­5 p.m.

CMP Consumable Metrics Task Force

3­5 p.m.

Test Wafer Subcommittee

4­6 p.m.

Edge Profile Task Force

5­6 p.m.

Materials Division Leadership

WEDNESDAY, JULY 16

8­11 a.m.

Silicon on Insulator Committee

8 a.m.­Noon

M2 Revision Task Force

Noon­1 p.m.

0.25-µm Epitaxial Task Force

1­3 p.m.

Epitaxial Wafer Subcommittee

3­5 p.m.

Wafer Dimensions Subcommittee

THURSDAY, JULY 17

8 a.m.­12:30 p.m.

Silicon Wafer Committee

TEST, ASSEMBLY, AND PACKAGING (SAN JOSE)

FRIDAY, JULY 18

1­4 p.m.

Probers Task Force

Handlers Task Force

LSI Testers Task Force

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