Product Extra!

An enhanced version of ASM Lithography's Advance 400 clustered modular vertical furnace reduces process and cycle time and increases throughput by more than 50%. The A400i tool lowers cycle time by 1 hour with a full 100-wafer load at 30°C/min ramp-up, including heating and cooling. The system uses air-injected forced cooling to maintain uniform temperature on all wafers. The 400i has the original model's flat zone, footprint, load
size, and nitrogen-purged ambient control. Information: +31 30 229 8411; fax, +31 30 229 3823. (Semicon West, San Francisco, South Hall, Booth 710)

Jensen Tools' FaxBack service delivers information from the supplier's catalog via fax to customers within minutes of receiving a phone request. The service operates 24 hours every day of the week. The Phoenix-based company offers tool kits, specialty tools, test equipment, and diagnostic tools. Information: 602/968- 6241, ext. 271.

U.S. Filter's replacement cartridge for Millipore Milli-RO and AFS systems contains a spiral-wound element with a microporous polysulfone support and a selective thin-film polyamide. The 12-in. thin-film composite cartridge fits into the Milli-RO system's housing, reducing the cost of element replacement. In addition to the membrane, the kit contains housing O-rings, installation instructions, housing hardware, tools, and adapter O-rings. Information: 760/341-8117. (Semicon West, San Francisco, Esplanade Ballroom, Booth 4009)

Pfeiffer Vacuum Technology has broadened the application range for Balzers Instruments' Prisma gas analyzer, exclusively distributed by Pfeiffer. The instrument now comes with mass ranges of 1­100, 1­200, and 1­300 amu, high-temperature operating capabilities, and a 90° connector for tight fits. The in situ tool is designed to detect vacuum leaks and trace-gas contamination. Information: 603/578-6500. (Semicon West, San Francisco, South Hall, Booth 5753)

Vertical thermal reactor systems from the Silicon Valley Group's Thermco division now carry the CE mark designating conformity with European Union safety, product, and environmental quality standards. The division will also carry the test mark of the firm conducting the audit, TÜV Rheinland, a competent and notified body of the EU. Information: 408/467-5847. (Semicon West, San Francisco, South Hall, Booth 2226).

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