Product Technology News

Cleaning Module

Hornell Engineering

Twinsburg, OH

By integrating processes, a combination rubbing/dry-cleaning module for LCD manufacturing reduces substrate handling and conserves cleanroom space. The noncontact cleaning process uses high-frequency waves from an ultrasonic head to eliminate 95% of particles greater-than or equal-to 1 µm. An exhaust airflow removes the particles.

Handheld UV Lamp

Honle UV America

Marlboro, MA

The Uvahand 250BL handheld UV lamp detects particles and microcontamination in cleanrooms. The 3-lb unit is especially useful for mobile applications, and it operates in all lighting conditions. It is equipped with a 250-W metal halide lamp and a black filter transparent to the UVA region of 325 to 400 nm. The power supply is either 110 V/60 Hz or 230 V/50 Hz.

Ion Implanter

Eaton

Beverly, MA

The ORion NV6072 flat-panel display ion implanter allows manufacturers to use polysilicon thin-film transistor processes to produce active-matrix liquid-crystal displays at low cost. Low-temperature polysilicon improves liquid-panel performance by enabling the fabrication of smaller, faster pixel transistors. The implanter's ribbon-beam ion source and panel-scanning system provide a dose uniformity of <±5% over an energy range of 5 to 100 keV. The system accommodates substrates up to 600 × 720 mm with thicknesses of 1.1 or 0.7 mm. Throughput is 60 substrates/hr.

Laminar-Flow Hood

Plastics Design & Fabrications

Glasgow, Scotland

The Whispair clean hood operates at 26.6 dB at 1 m using a 6 × 3-ft filter set at 90 ft/min. The vertical laminar-flow hood has no baffling. Compatible with FS 209E, the unit can be used as a stand-alone workstation, as a cleanroom ceiling module, or as an air supply module for a minienvironment. The lightweight hood incorporates an acoustically decoupled fan with stepless variable solid-state speed control. The low-profile filter is sealed with a dielectric gel.

Thin-Film Measurement Tool

Tencor Instruments

Mountain View, CA

The Prometrix UV-1280SE thin-film measurement system combines spectroscopic ellipsometry and broadband spectrophotometry in a single platform, making it especially useful for etching, photolithography, and CMP applications. The tool simultaneously measures film thickness and refractive index, as well as the extinction coefficient of single- or multilayer thin-film stacks. Additional capabilities include a simultaneous multilayer measurement algorithm for high throughput, as well as an etch-to-clear algorithm for production environments. The system processes up to 120 wafers/hr.

HPLC Pump

Waters

Milford, MA

The front panel and user interface of the freestanding Model 515 HPLC pump are designed to simplify programming and operation. A two-line LCD and keypad help the operator program up to eight different functions, including flow-rate calibration and compressibility compensation. The isocratic pump uses dual reciprocating pistons and permits external control from workstations running the manufacturer's software. An optional accessory extends the pump's flow-rate range to 22 ml/min for semipreparative purification work.

Forced-Hot-Air Dryer

Ney Ultrasonics

Bloomfield, CT

Designed for use in the Envirosonik line of ultrasonic cleaning systems, the HyperDryer uses a forced-air design to reduce drying times by a factor of three compared with conventional hot-air dryers. Drying time is 4 minutes for a 12-lb basket with a depth of 2 in. The dryer's airflow targets the bottom of the cleaning basket, usually the hardest area to dry. The design offers uniform airflow and heat distribution while maintaining maximum air velocity. Standard 10- and 35-gal sizes are available, and the dryer can be fitted with standard or HEPA filters.

FPD Processing System

Applied Komatsu Technology

Tokyo, Japan

A single-substrate multichamber system for plasma CVD, plasma etch, and PVD processes, the AKT 4300 system handles substrates measuring up to 600 × 720 mm. Equipped with a preheat chamber, the system enables manufacturers of thin-film-transistor LCDs to fit six 14-in., four 17-in., or two 21-in. displays on each substrate. Remote plasma source cleaning technology reduces both operating and maintenance costs in CVD processes.

Gas Filters

Arbor Technologies

Ann Arbor, MI

Polycap TF and HEPA-Cap encapsulated filters deliver ultrapure gases and high flow rates in air delivery systems. Filtration areas range from 16 to 2200 cm². A wide selection of connectors and housing sizes are available.

Centrifugal Pump

Ansimag

Elk Grove, IL

The KM-series centrifugal pump has a Teflon fluoroplastic casing and impeller and silicon carbide shaft and bushing, enabling it to resist corrosive chemicals such as hydrochloric acid, sulfuric acid, and sodium hydroxide. The horizontal magnetic-drive centrifugal pump features proprietary mold-in-one technology. Suitable for use in temperatures less-than or equal-to 250°F, the pump operates at 100 gal/min at a maximum of 110 ft with a 5-hp motor.

Conductivity Sensors

Rosemount Analytical

Irvine, CA

Designed for use in high-purity water systems, Endurance conductivity sensors feature titanium palladium electrodes for strong chemical resistance and wetting characteristics. The sensors measure conductivity and resistivity in high-purity water systems. Model 400 sensors are equipped with a Pt 1000 RTD temperature compensator offering pressure and temperature ratings up to 1481 kPa/200 psig @ 200°C. A 10-ft integral cable is a standard feature. Model 401 sensors measure concentrated acids, bases, or salts. Both versions can be used with two- and four-wire transmitters.

Coating System

FAS Technologies

Dallas, TX

The Extrude & Spin coating system combines direct extrusion with conventional spin coating to apply thin-film coatings of photoresists, polyimides, and other polymers to the surface of large-area substrates. Moving over the substrate, the extrusion head applies process material before a brief spin cycle produces final uniformity. The dual system provides high throughput, decreases spin time, and reduces chemical waste.

Gas-Phase Filters

Filtration Group

Joliet, IL

The media construction of AQF gas-phase air filters exposes the adsorbent to gaseous contaminants in the air, removing large amounts of airborne molecular contaminants. The filters are effective against VOCs, acids, and corrosive gases. Virtually dust-free, the filters have a low pressure drop and are designed for easy installation and disposal.

Ionizing Air Pencil

Ultron Systems

Moorpark, CA

The Model UH 212 ionizing air pencil removes dust and particles from surfaces. The tool also neutralizes static charge on small or sensitive parts and controls the reattraction of contaminants to the cleaned part. The pencil and its 6 1/2-ft electrical cord weigh 8 1/2 oz. By ejecting a jet of ionized air onto the surface, the pencil releases an electrostatic charge as it is moved across a surface. A disposable filter and compact power supply are additional features.

Flowmeters

McMillan

Georgetown, TX

S-series flowmeters feature a 3 1/2-digit LCD with 0­5-V dc output for recording data. Capable of precision measuring even in slow liquid or gas flow rates, the flowmeters come in 14 ranges of from 13­100 to 2000­10,000 ml/min. An ac/dc adapter plug is an option.

Cable Ties

Advanced Cable Electronics

Westboro, MA

Strap Loc continuous-length cable ties reduce the need for stocking many different lengths of ties. The product is cut from a spool and assembled according to need with locking devices made of stainless steel and nylon. Excess tie material can be reused, thereby reducing waste. The ties can be used to bundle large objects, separate and space wires, fasten through-panels, and multiple-wrap for applications requiring high tensile strength. Minimum loop tension is 120 lb, and minimum loop diam is 1/16 in.

Cleanroom Footwear

Lehigh Safety Shoe

Endicott, NY

A substitute for the traditional overboot, the CRS-1 fitted shoe is designed to be worn comfortably in Class 1 or 10 cleanrooms. Nonbrushed linings, a gusseted tongue, stitched outsole sidewall, and customized heel cushioning are standard features. Sizes range from a woman's 3 to a man's 15. Twenty-eight sizes are available in all.

Clear PVC Piping

Harvel Plastics

Easton, PA

Suitable for cleanroom and dual-containment use, Clear Schedule 40 rigid PVC pipe comes in sizes of 1/4 to 8 in. with clear fittings of 1/4 to 4 in. The lightweight pipe resists corrosion and installs easily using solvent-weld joining techniques. Fittings include male and female adapters, 90° and 45° elbows, t-shapes, couplings, reducer bushings, and end caps.

Static-Dissipative Wiper

Texwipe

Upper Saddle River, NJ

Measuring 9 in. sq., the TX025 is a continuous-filament nylon wiper that dissipates electrical charges to a measurable surface resistivity of 10⁶ (omega). The wiper needs no humidity or ambient moisture to be effective. Its uniform dissipative surface and body eliminates potential hot spots of charge. The wiper contains no carbon-filament grid or stripe conductive system that could leach carbon or leave particles.

Mass-Flow Controller

Sierra Instruments

Monterey, CA

The Mass-Trak mass-flow controller is an alternative to volumetric flow measurement devices that are sensitive to changes in operating temperature and pressure. The MFC's integrated proportional control valve allows precise control of critical gas flows at flow rates less-than or equal-to 50 std L/min. Other features include an onboard display and set-point control that eliminate the need for separate power supply and readout electronics. The instrument's large sensor tube prevents clogging.

Environmental Monitor

Thermo-Mizer Environmental

Ridgefield, NJ

Suitable for cleanroom use, the PHT-101 environmental monitor and alarm has a single digital transmitter that processes information such as temperature, pressure, and humidity. Readings and alarm points are displayed on a digital alphanumeric panel, and data can be output to facility automation systems. The modular design features RJ-45 connectors for rapid installation. NIST-traceable inputs are optional.

Cleanroom Gowning Racks

Eagle MHC

Clayton, DE

Gowning racks for Class 1 to Class 100,000 cleanrooms are manufactured in widths of 48, 60, 72, and 84 in. Made of electropolished 304 stainless steel with no. 4 brushed finish, the racks have hanger rails made of 14-gauge stainless steel that are offered on slots located on 1 1/2- , 2 1/2- , or 3-in. centers. Racks are available with removable or nonremovable hangers.

Voltmeter

Trek

Medina, NY

The Model 520 voltmeter is a pocket-sized, handheld tool for measuring electrostatic surface voltages over a wide range of spacings. This capacity enables operators to inspect small spots for charge accumulation. An LCD shows measurements of ±1999 V. The chopper design features a low-voltage ac nulling technique to achieve spacing-independent measurements. A voltage monitor output for connecting to a recording device is optional.

Flow Sensor

Malema Engineering

Boca Raton, FL

The M-10000 rotary wheel flow sensor provides linear output of ±2% at temperatures less-than or equal-to 150°C. The sensor's ceramic shaft and Rulon-bearing insert for the Teflon miniature rotor wheel give the device a lifespan of about seven years. Features include a flowmeter with an output of 4 to 20 mA, an adjustable flow switch, an LED linked to a relay, and a visual flow indicator. Surface-mounted in NEMA-4 splashproof housing, the sensor is suitable for use in CMP, cleaning, etch, and chiller systems.

Flatness Inspection System

Wyko

Tucson, AZ

Designed for disk-drive manufacturers, the IR6 flatness inspection system accurately measures two-sided flatness and parallelism on disks and blank substrates in one pass. The system's 10.6-µm laser accommodates very rough surfaces, and its dual-beam technology enables surface parallelism measurement and two-sided flatness measurements without repositioning. The system processes up to 24 disks/min and accommodates substrates measuring less-than or equal-to 130 mm. Customized analysis software runs on Windows NT 4.0 and a Pentium Pro PC to generate two-dimensional cross-sections, contour plots, and 3-D images. Three models of the system are available.

Digital CCD Camera

Cooke Corp.

Tonawanda, NY

Suitable for wafer inspection, the SensiCam digital CCD camera provides a spectral response from 280 to 1000 nm and produces color or black-and-white images at video rates up to 30 frames/ sec. The 12-bit imaging system distinguishes both bright and dim signals. The camera comes with 640 × 480 element and 1280 × 1024 element scientific-grade CCD sensors and two-stage Peltier coolers. A PCI interface board and utility software are standard features.

Workstation Monitor

Charleswater, MA

Canton, MA

The Model 19205 dual-operator and workstation monitor is an impedance and resistance sensing device. The instrument continuously monitors two single-wire wriststraps and coil cords as well as the work surface to ensure proper grounding. Three pairs of red and green LEDs indicate grounding status. When a fault occurs the red LEDs flash and an alarm sounds.

Cleanroom Mat

Liberty Industries

East Berlin, CT

The 6000M10 Super Kleen Tacky Mat consists of a resilient polyfoam cushion fixed to the base of each sheet. The cushion conforms to the shape of the shoe to lift off contaminants. The pressure-sensitive surface removes all types of dirt and dust from shoes, wheels, and casters. The mat has 10 disposable layers. Peeling off the contaminated layer exposes a fresh surface. The plastic frame is double-contoured to permit unencumbered movement of personnel and carts.