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Back Issues of MICRO Magazine
October/November
2003 | August/September
2003 | December
2003
July 2003 | June
2003 | May
2003
April
2003 | March 2003 | January/February
2003
December
2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
IMEC, five big chipmakers launch 45-nm research program
(Sidebar:
IMEC 300-mm process facility will be cornerstone of new program)
- Lefty: Vapor
ware
- Breakout: New
name, familiar tools; Aviza Technology enters the thermal
process market fray
- World
Beat:
Asia: FSA expands in region; Novellus, Fudan University
to establish manufacturing tech facility; Air Prods, SinoMOS
ink clean dry air, bulk gases deals; Trebor grows in Japan
Europe: Wacker Siltronic consolidates, ramps 300-mm capacity
- Market Outlook:
Big
wafers, big growth
- 'Round
the Circuit: Infineon chip finds faults; EUVL on track;
KLA-Tencor nabs MESA award; Semiconductor Services offers
in-house training
- Expansions and
Acqusitions:
SCP Global gives AMAT rights for drying-technology applications;
Brooks, Schneider team up on APC; Oxford, Hi-Tech get a grip
on coating technology; Praxair expands PVD biz; Mykrolis buys
Aeronex; Fab Solutions scores funds
GREATEST HITS OF 2003
This
year's Greatest Hits
of 2003 have been chosen. The product selections, reflecting
offerings in the IC and microelectronics manufacturing supply
chain, include supercritical CO2
chambers, macrodefect inspection tools, copper electroplaters,
ALD tools, ion implanters, wafer carriers, pressure regulators,
pinch valves, metrology tools, and much more.
October/November 2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
Chipmakers sparing no effort to cut manufacturing costs
- Lefty: No
mirage
- AEC/APC Symposium
Report: Taking
control of "weirder and weirder" products
- Biz Tech: Mask
projections
- Breakout: Upgraded
campus fab to give engineering students taste of chipmaking
experience
- World
Beat:
Asia: SMIC eyes $1B in tools; GE Global structures
AMD-Fujitsu deal; Lytron opens service depot; Torrex snags
reorder; SCP Global wins tool orders
Europe: ASIC design center opens; Genus sells ALD tools
- 300-mm Imperative:
Inotera
to install Axcelis tools; Sematech lauds SEZ; Mattson adds
new DRAM customer
- MEMS Zone: Start-up
receives DOE MEMS contract; microsystems CD-ROM updated; Intelligent
Micro Patterning upgrades micromolding
-
'Round
the Circuit: NIST aids 'liquid lens'; chip surge
helps cleanrooms; SPIE launches digital library;
ASTM opens up standards; books cover films, defects
-
Expansions
and Acqusitions:
AMD
buys National Semi unit; Air Products purchases Ashland electronic
chem business; managers to buy out WWK; Schlumberger team
launches metrology firm; DuPont forms materials unit; Oxford
gets Thermo VG; Edlon inks plastics pact with 3P
PRODUCT TECHNOLOGY NEWS
-
Products:
Photomask cleaning tool, wafer transfer/loadlock system,
cordless vacuum wafer wand, enclosed adjustable-speed
drives, pressure regulator, integrated metrology tool,
cleanroom-compatible filters, liquid optical particle
counter, storage system/stocker, extractive gas monitor,
ESD monitoring system, machine control system, mechanical
vacuum pump, field emission SEMs, continuous gas-emission
monitor
-
Product
Extra!:Vendor
releases new version of wafer-mapping software; supplier
awarded pressure transducer, flow control patents; noncontact
measurement system upgraded to include Windows 2000; manufacturer
augments fluoropolymers with new grades; software permits
real-time control of robots, motion controllers; vendor
offers Website product tour for fiber types, contactor
designs
August/September
2003
Selected Contents
EDITOR'S
PAGE
INDUSTRY
NEWS
- Lead Story:
Chip industry searches for solutions to slow start for low-k
materials
- Lefty: Face
reality
- Breakout: Finnish
optoelectronics firm eyes breakthrough with spin-on material
- Breakout: Institute
seeks to speed carbon nanotube transistor use
- World
Beat:
Asia: Tel, Nikon accelerate liquid immersion work;
Silterra to expand in Asia, Europe; TSMC adopts PDF Solutions
technology for 90-nm ramp; SMIC buys yield program from Virage
Middle East:
IBM opens design center Europe
Europe: IMEC, Soitec, Umicore to tackle <45-nm scaling;
Infineon consolidates Service centers; Micronic, ASML to develop
optical maskless litho technology
- Photo Gallery:
Automated
marriage
- 300-mm Imperative:
UMCi
installs more tools; TEL sells track modules; fab buys Mattson
strip systems; Asyst sells RFIDs
- Tech Trends:
Emerging
fab technologies
-
'Round
the Circuit: Metology market heads for $4B;
SEMI elects Chamillard; Immersion tools see progress;
gloves, cots RP published
-
Expansions
and Acqusitions:
TI
plans new 300-mm fab; Cabot Supermetals opens
films center; Axcelis gets Matrix; BOC
buys Eco-Snow assets; Matheson to double capacity;
ATMI buys ESC; Implant Sciences to triple capacity
-
MEMS
Zone: Optical
outlook is strong; Planartechnik buys QuickSIlver
inspection tool; CD tool installed at U of Alberta;
Silex purchases EV Group litho tools
-
-
- Behind
the Mask: Studying chemically amplified resists and
top antireflective coatings in photomask fabrication
PRODUCT
TECHNOLOGY NEWS
-
Products:
MEMS etch/deposition tools, gas-line heater system,
supercritical CO2 chamber,
trench measurement tool, integrated metrology platform,
control technology, transfer station, 300-mm copper
electroplating tool, pressure transducer, metrology
unit, ion implanters, cross-sectional analysis,
handheld particle counter, antivirus software, flowmeters,
quiet ball screws, microstructure monitoring, wafer
cassette transfer carts, remote plasma source, overlay
measurement system
-
Product
Extra!: Supplier offers critical shape metrology
on a CD-SEM; surface conditioning system combines improved
hardware, software, process features; vendor adds ultra-high-purity
system to gas-delivery products; resolution enhancement
tools extended; package reduces robot teaching times;
supplier awarded patent for in situ wafer temperature
measurement; chemical Web site offers new customer-service
features; specular reflectance standards for reflectivity
surface measurements introduced; vendor's pellicle service
allows customers access to inspected photomasks
July 2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
Ad hoc metrology association hopes to take measure of ITRS
- Lefty: Make
and model
- Breakout: Applied
Materials makes first diagonal X architecture test IC, consortium
reports
- World
Beat:
Asia: China foundry buys Mattson tools; Air Products
installs gas supply equipment at Samsung; ASML sells to ASMC;
MySem installs Feinfocus x-ray inspection tool
Asia/Europe:
DHL to handle FSI goods
Middle
East: Tower taps KLA-Tencor tools
- SIA Forecast:
A
Chip Shot
- 300-mm Imperative:
Axcelis
touts resist strip tool; Wacker buys SemiTest metrology system;
Mattson client wants more process equipment; GSI Lumonics
to ship wafer repair system to Powerchip; UMCi Singapore chooses
ASML tool
- New Materials Roundup:
Ebara
joins SiLKnet; Sematech says low-k will be ready in 2003
-
'Round
the Circuit: Films to meet roadmap goals;
SEMI releases 13 new standards; maskless litho
tool called a success; Molecular Imprints ships
novel litho tool to Motorola; IEST publishes outgassing
RP
-
Expansions
and Acqusitions:
Infineon eyes Senso-Nor; ASM, Soitec sign strained
SOI pact; Ziptronix finds funds for wireless devices;
Despatch concentrates business, manufacturing
functions under one roof; Enthone gives ATMI rights
to use, sell copper processes; Entegris sells
wafer shippers to two chipmakers
PRODUCT
TECHNOLOGY NEWS
-
Products:
Wafer-edge inspection tool, AMHS integration,
defect inspection tool, pad-conditioning
system, depth filter cartridges, reticle
area filter, atomic layer deposition tool,
single-wafer wet-process cleaning, E-beam
inspection system, wet-process station,
closed-loop gas chiller, photoresist dry
stripper, dual-axis servomotor controller,
post-CMP cleaning solution, safety curtain
-
Product
Extra!: Method determines trace-metal contaminants
in phosphoric acid; new technique for scanning probe
microscopes released; components supplier issues O-ring
guide; company offers vision-based autofocusing for
CD tool; vendor expands wafer-mapping package; supplier
software manages sampling needs of batch-based operations
June 2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
Nanoimprint
firms begin to make an impression
- Lefty: Unforgivable
- Breakout: Brainstorming
team develops new tool for analyzing wafer edge contamination
- World
Beat:
Middle East: Tower snares volume order from Alliance
Semiconductor
Asia: Selete buys analytical tools from n&k Technology;
TEL to build office in Shanghai
Europe: ON Semiconductor opens fab in Slovak Republic;
Intelligent Micro Patterning to help build MEMS line at Madrid
university; Europractice IC Service, MOSIS to offer additional
AMI Semiconductor technologies
- Biz Tech: Counting
pennies
- 300-mm Imperative:
Axcelis
touts program to speed up tool installation; FSI nabs repeat
order
- The MEMS Zone: Tronic
Microsystems opens French plant
-
'Round
the Circuit: NIST, Hewlett-Packard claim to
have measured capacitance-voltage of molecular
device; McIlvaine report projects surge in UP
water market; Applied elects Michael Splinter
as CEO, president; ASMC seeks papers
- Expansions and
Acqusitions:
Applied
buys Boxer Cross; Keithley, Novellus team on copper, low-k
integration tests; Purus starts up disposables business; Swagelok
forms semi services unit; Newport improves test and metrology
lab for motion control products
PRODUCT TECHNOLOGY NEWS
-
Products:
Acetone washing machine, noncontact analog position
sensor, thermal metrology tool, CO2-process
metering pumps, thin- and thick-film SOI wafers,
small-volume etch/deposition tool, 300-mm FOUP
cleaning system, 1X stepper, CMP polishing pressure
mapping, pumping and abatement unit, ozone generator,
particle-measurement system
-
Product
Extra!: Supplier offers connectivity software
to achieve 300-mm compliance; vendor provides
CD with linear-motion product catalogs and manuals;
instrument maker receives patent for acoustic
particle sizer; vendor publishes brochure on electric
heater, temperature-sensing products; supplier
augments resist-parameter-determination software;
toolmaker granted CMP endpoint patent
-
The
show section
features a rundown of show activities, including
the Technology Innovation Showcase and the MEMS
Pavilion.
May
2003
Selected Contents
INDUSTRY NEWS
- Lead Story:
Litho
simulation start-up wants to keep chip industry on right track
- Lefty: Test
and measurement
- World
Beat:
Asia: TSMC touts 130-nm process; SMIC buys Veeco profiler;
Tevet hires Hakuto to sell its metrology and APC products;
Waseda University installs EV Group nanotech tools
Europe: Entegris expands in Germany; Xtreme Technologies
ships prototype of EUV light source to Exitech; Epichem, Degussa
to supply silane-based products
-
'Round
the Circuit: IMEC, National Semiconductor
to develop 180-nm SiGe-based BiCMOS processes;
Cypress Semiconductor makes first 90-nm device
with DuPont advanced imaging mask; USDC collaborates
with DCI Acquisition to improve machine-vision
inspection for microdisplays; ASTM invites students
-
Expansions and
Acqusitions:
ICD/Heateflex buys Fluidix; Soitec acquires Picogiga; Brooks
signs automation pact with Tibco; Air Products launches
materials delivery systems unit
PRODUCT TECHNOLOGY NEWS
-
Products:
As part of its 20th anniversary celebration, MICRO
presents a Product Technology News section highlighting
four companies' products today and two decades ago.
 This
month MICRO presents a special section devoted to
its 20th anniversary. The section includes essays by long-time
industry veterans who muse about the magazine's evolution
and about such broad-ranging topics as defect reduction
and ESD control. In addition, it provides a 20-year time
line, short Q&As with industry notables, and statistical
factoids comparing then and now. The section concludes with
the MICRO 20th contest, offering attentive readers
a chance to win Beyond Imagination, a handsome coffee-table
history of the semiconductor industry. Just click here,
or on the photo at left to open the PDF file. |
April
2003
Selected Contents
INDUSTRY NEWS
- Lead Story:
Two
vendors find recipes for relative success in down market
- Lefty: Good
vibrations
- Breakout:
Industry
must address potential problems in materials supply chain,
ISMT study asserts
- Business Trend:
Putting
China into perspective
- Breakout:
Public-private partnership discussing U.S. mask consortium,
says newsletter
- World
Beat:
-
Europe:
IMEC, AMI Semiconductor launch program to reduce
ASIC costs
Asia: Cymer opens South Korean chamber plant;
Asyst installs materials-handling system in China
-
-
'Round
the Circuit: Canon to ship first 157-nm litho system;
USDC publishes roadmap for FPD, LED industries; cleanrooms
get a boost; Silicon Valley honors Asyst founder
-
Expansions
and Acqusitions:
Ibis joins IBM on SOI; Rite Track enlarges plant; Philips
starts new metrology unit for copper, low-k processes; Coherent
to buy Positive Light; Gems Sensors purchases Pressure Devices;
Innovative Design Solutions hires Citadel Technologies to
represent line of chemical, solvent, CMP products; Arch Microelectronic
Materials, Fuji Photo Film embark on photoresist upgrade program
PRODUCT TECHNOLOGY NEWS
-
Products:
Overlay metrology tool, micromachining laser, lead
screw assemblies, mask repair system, chemical control
software, optics contamination sampling, run-to-run
APC software, ultra-low-voltage CD-SEM, fluoropolymer
diaphragm valves, slit- and gate-valve doors, motor
with planetary gearbox, diffusion-furnace software,
industrial excimer lasers
- Product
Extra!: Supplier enhances dry-strip system; vendor receives
patent for high-power vacuum ultraviolet light generation;
toolmaker extends capabilities of x-ray diffractometer; company
issues approval standard for use of wafer carriers in cleanrooms
March
2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
Roadmap
right-of-way yields to recession
- Lefty: To
dye for
- Breakout:
Polcari,
senior IBM technologist, replaces Helms as head of International
Sematech
- World
Beat:
Asia:
Mitsubishi signs strained-silicon pact with
AmberWave; Schlumberger hires Seki Technotron
as sales agent; Jazz duets with ASMC; Selete,
two Japanese mask makers order Veeco AFMs; Hanwha,
Plasmion create negative-ion-beam deposition
partnership; Mallinckrodt opens lab
Europe: Rockwood Specialties gets facelift
Australia: Technology Futures Conference
scheduled
Middle East: Lytron names Israel Scientific
Instruments as distributor
-
'Round
the Circuit: Sematech,
SUNY tackle NGL; JMAR claims litho leap; process delivery,
control segments to grow; ASTM updates metric standard;
Ting heads SEMI China
- Expansions
and Acquisitions:
Entegris buys Asyst lines; SCP to buy Mattson wet tool biz;
Spectra absorbs Thermo Electron businesses; Veeco, FEI nix
merger; Solvay launches Solexis; Microchip seeks fab buyer;
Synopsys to buy Numerical Technologies
- Photo
Gallery: Shipley
opens tech center
- 300-mm
Imperative: IMEC to build new cleanroom; sales of 300-mm
front-end tools to grow in 2003; UMC installs process equipment
in Singapore fab; Varian, BOC Edwards, ASM subsidiary book
tool orders
- What's
Going On: Semicon
Europa, MRS meeting, and more
- Business
Prognosis : Fab
utilization, capacity sluggish
TECHNICAL ARTICLES
-
Special
Apps:
Reducing defects in integrated surface-micromachined
accelerometers
- BEOL
Equipment: Using
RF metrology to optimize HDPCVD plasma cleans
- Green
Manufacturing: Replacing
piranha cleans with an O2 RIE/fluorine process
to remove post-ion-implant residues
- Materials
Integration: Improving spin-on-glass processes by
using pump and filtration technology
PRODUCT TECHNOLOGY NEWS
-
Products:
MEMS metrology, wafer-measurement system, high-capacity
filter cartridges, electronic optical alarm, mass-flow
controller, atomic force microscope, MEMS motion analyzer,
industrial membrane contactor, noncontact 3-D surface
profiler, high-purity pressure vessels, miniature
gearhead, etch-residue removers, copper-plating chemistry,
cleanroom ionizing gun, controlled resistivity ceramics,
pressure-measuring instruments, tool pedestal, helium
leak detector sniffer, digital pressure controllers
-
Product
Extra!: Vendor offers kit to test technical feasibility
of thermometry system; consulting service opens thermal
Web site; supplier publishes pump repair guide; vendor
publishes specialty gas and equipment reference guide
SEMICON EUROPA 2003
-
The
show section
features a preview of ASMC, the AEC/APC Europe
conference, and the Fab Managers Forum
January/February
2003
Selected Contents
EDITOR'S PAGE
INDUSTRY NEWS
- Lead Story:
Basically,
backers have big plans for new nanoscience center
- Lefty: Worth
their weight
- Breakout:
SPIE
symposium expands manufacturing conference; highlights
IC costs, APC
- World
Beat:
Europe:
Matsushita
Electrial Industrial to collaborate with IMEC on
high-k dielectric
Asia:
Samsung Electronics licenses Numerical Technologies'
phase-shift technology; Huajing Microelectronics
orders ASML photolitho systems; FSI ships
first cleaning tool to Japanese chipmaker;
Oxford sells GaN tools to ITE Compound Semiconductor
and Epitech Technology; Jon Goldman chooses
Grandway to represent it in China, Taiwan
-
'Round
the Circuit: BOC
Edwards, Micell Integrated Systems to develop supercritical
CO2 delivery system; IBM readies
90-nm chip; Applied promises better yields; Kopin
claims LED breakthrough; Shadman receives EHS award
- Expansions
and Acquisitions:
Corning reaches full production of CaF2
crystals at expanded plant; ISE Integrated Systems and
Sigma-C partner on litho simulation products; DuPont Displays
and Universal Display pinpoint OLEDs; Newport opens optics
plant; Luxtron moves HQ
- Photo
Gallery: Looks
good on paper
- 300-mm
Imperative: Sematech is damascene ready; Toshiba to
build two fabs
TECHNICAL ARTICLES
-
Taking
Control: Improving overlay performance
in lithography tools using run-to-run control
- Behind
the Mask: Using simulation-based technology to qualify
altPSM for 193-nm lithography
- Defect/Yield
Analysis: Reducing defects methodically through
fab/vendor process and metrology collaboration
- Wet
Surface Technologies: Implementing a single-wafer
cleaning technology suitable for minifab operations
PRODUCT TECHNOLOGY NEWS
-
Products:
MEMS deep-oxide ICP etch tool, gas flowmeter
power supply, x-ray sources, polishing tool,
silicon wafer analyzer, copper CMP control
profiler, etch tool APC system, noncontact
measurement system, CMP slurry pinch valves,
rigid-wall cleanrooms, macrodefect inspection
system, EUVL simulation software, scanning
thickness mapper, chemical line sampler, particle
counter
- Product
Extra!: Toolmaker offers enhanced connectivity software;
supplier provides pressure/vacuum loadlock transducer;
company launches MEMS, NEMS patent profile info; vendors
add new specialty gases to subatmospheric safe-delivery
sources; supplier enhances CMP polishing pads
MicroHome |
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Questions/comments about MICRO Magazine? E-mail us at cheynman@gmail.com.
© 2007 Tom Cheyney
All rights reserved.
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