The
Puma 9000 series of patterned-wafer inspection tools is for use at the
65-nm node and beyond. The tools incorporate Streak technology, which
combines advanced UV illumination optics with high-speed imaging to
provide a range of inspection modes optimized for critical-defect detection
without compromising throughput. Configurable and extendable across
several technology generations, the tools offer sensitivity and throughput
improvements over traditional laser scattering systems, enabling chipmakers
to implement higher sampling strategies to protect wafers in process.
With multiple inspection modes, the systems can be used in a variety
of process applications for both logic and memory production. They also
have effective pattern-filtering and noise-suppression capabilities,
which provide improved defect-signal capture on critical etch layers
in memory applications. (Semicon West, South Hall, Booth 426)
Portable
Cleanroom Fogger
PWC
Technologies
Beaverton,
OR
The
portable ultrasonic Fog-Gun is for use in environments that require
totally portable, visible vapor generation. The battery-powered, handheld,
on-demand fogger has no extension cords, is portable and lightweight,
and is equipped with a two-speed fan. Built-in tilt and level sensors
protect the transducers. A 6-ft hose can be used for remote fogging,
and a belt clip assists in easy transportation. The fogger is equipped
with a trigger-bypass switch for continuous fog use. Two battery packs
are included with the device; each battery lasts for approximately 50
minutes between chargings. The fogger has a water capacity of 1.25 cups
and a fog life of approximately 40 minutes.
Spent-Ultrapure-Water
Meters
Universal
Flow Monitors
Toledo,
OH
Two
types of meters can help IC manufacturers to reuse spent ultrapure water:
vane meters made of PVC, 316 stainless steel, and Viton and plastic
see-through variable-area meters made from polysulphone. The vane meters
provide a local indication of flow rate and have a simple design. They
also have cost-effective transmitters for remote readouts, recording,
or data logging, and alarm switches that indicate flow failure. The
SX model accommodates 1/4- to 3/4-in. pipe and handles flows from 3
to 20 gal/min, while the MX model is for use with 3/4- to 2-in. pipe
and handles flows from 10 to 160 gal/min. Insite variable-area meters
enable users to see the fluid. They are available in a model for 1/2-
to 1-in. pipe that handles flows from 5 to 15 gal/min and a model for
3/4- to 1 1/2-in. pipe that handles flows from 20 to 50 gal/min.
ArF
Excimer Laser
Gigaphoton
Oyama,
Japan
For
use as a mass-production lithography light source at the 65-nm node
and below, the GT40A is a 4-kHz argon fluoride (ArF) excimer laser equipped
with an injection-locking resonator. The resonator ensures highly stable
emission of a deep ultraviolet beam with a high output of 45 W. It also
offers a spectral bandwidth of 0.2 pm for full-width half maximum and
0.5 pm for E95, the highest bandwidth level in the semiconductor industry.
In in-house and OEM tests, the laser has demonstrated stabilized high
performance, low running costs, and excellent reliability and uptime.
The injection-locking technology reduces the load on the laser optics.
In addition, the system configuration has been refined to reduce the
number of consumables (modules) and their replacement frequency. A self-diagnosis
function simplifies module replacement and serviceability.
Liquid-Flow
Controller
Celerity
Milpitas,
CA
Unit
L–series liquid-flow controllers use proprietary InFlo technology,
which is based on ultrasonic sensors and optimized signal-processing
algorithms. The unit controls and monitors slurry and liquid-chemical
recipes at the point of use. It is for use with flows ranging from 50
to 2000 ml/min and has an accuracy of ±1% of flow. (Semicon
West, South Hall, Booth 2426)
Megasonic
System
ProSys
Campbell,
CA
The
TableTop megasonic system is a single-substrate and specialty-parts
cleaning system in a compact package. The unit can be operated in continuous
or pulsed mode and has an LCD operator interface, recirculating process
fluid, and optional heat control. The system's transducer arrays, electronics,
controls, and software are all patented technologies. The standard configuration
is used to process 200-mm substrates. (Semicon West, North Hall,
Booth 5448)
Electrical
Flex-Circuit Seals
Pave
Technology
Dayton,
OH
Hermetically
sealed PAVE-Flex through-bulkhead electrical flex-circuit seals are
for use in low or high vacuum or pressure. The helium leak-tight seals
operate to <10–7 cm3/sec of helium at
10–8 Torr vacuum. Virtually any Kapton-insulated flex-circuit
design can be manufactured in space-saving, high-circuit-density, high-speed
designs. The seals are used in semiconductor processing equipment and
scanning electron microscopes.
Miniature
Screw Rail
Kerk
Motion Products
Hollis,
NH
The
Mini ScrewRail, a compact addition to a line of screw-rail linear actuators,
is for use in applications that require accurate positioning in a confined
space. The screw rail consists of a precision rolled leadscrew, supported
by sealed bearings and contained within a concentric steel guide rail
that drives an integrated nut/bushing. Because all the alignment requirements
are achieved within the screw rail, its support and positioning are
much less critical than with traditional slide assemblies. The component
is available with a 0.375-in. outside diameter. It has proprietary Kerkote
TFE coating on both the leadscrew and guide rail, minimizing drag torque
and extending wear life. (Semicon West, Gateway, Booth 3311)
Micro/Macro
Defect Detection
Leica
Microsystems Semiconductor
Wetzlar,
Germany
For
use in 200- and 300-mm wafer applications, the LDS3300 C micro/macro
defect detection tool performs automated defect detection, classification,
and in-line review. Offering a throughput of up to 130 wafers per hour,
the tool combines the advantages of the INS3300 inspection and review
system with the ability to inspect the entire wafer surface for macroscopic
defects. Using simultaneous bright- and dark-field illumination, the
macro module captures a full-color image of the entire wafer surface.
The image is compared with all die on the wafer or to reference information.
Differences are considered defects and are compared with an image library
of known classified defect groups. Using automatic defect classification,
the system determines whether the wafer is in a go/no-go, in-line microscope
review, or alarm condition. (Semicon West, South Hall, Booth
1926; Moscone West, Booth 7521)
Strained-SOI
Wafers
Soitec
Bernin,
France
Strained-silicon-on-insulator
(sSOI) wafers enable a wide range of high-speed, low-power IC applications,
including those with high-performance logic cores. The 300-mm wafers'
electron mobility enhancement factor (up to 80%) is built into the substrate,
spreading the strain benefits to all regions of the IC and to all transistor
geometries. In addition, the substrates can break through the power-dissipation
barriers that are becoming an increasingly critical roadblock to higher-performing
chips. Manufactured using the patented Smart Cut process, the substrates
exhibit stress of 1.5 GPa with homogeneity of ±7% across the entire
wafer, which is equivalent to strain of almost 1%. The strained-silicon
layer is 200 Å thick with a uniformity of ±3% and has a surface
roughness comparable to that of premium bulk silicon wafers. (Semicon
West, North Hall, Booth 5425)
Diode-Pumped
Solid-State Laser
Bavarian
Photonics
Munich,
Germany
The
Aion Industrial 1064-32-V diode-pumped solid-state laser has a 32-W
TEM00 at 1064 nm. At 30 kHz, the laser's energy per pulse increases
to 1000 µJ. The infrared laser has a pulse width between 10 and 80 nanoseconds,
which is dependent on different repetition rates. The unit's modular
design and long life ensure excellent reliability and low maintenance.
The laser can be used to perform micromachining applications. (Semicon
West, Moscone West, Booth 9513)
Wafer
Reader
DVT
Machine Vision
Duluth,
GA
By
reading, recording, and responding to industry-standard wafer identification,
the Wafer Reader offers the product traceability and real-time validation
required throughout the fabrication process. Integrated lensing and
lighting capabilities provide the flexibility required to read codes
consistently throughout production processes that change the wafer's
appearance. The instrument has high resolution of 1280 X 1024 pixels
and a large field of view of up to 34 X 26 mm. Its built-in processor,
a Texas Instruments DSP with 64 MByte RAM and 16 MByte Flash memory,
eliminates the need for a framegrabber or PC. The user interface supports
both Windows and Windows CE platforms, and its automated software programming
and light tuning provide quick and easy setup. The system handles 2-D
matrix codes, bar codes, and OCR; it supports SEMI M12, M13, T1, T2,
T3, and T7 codes, as well as IBM codes. (Semicon West, North
Hall, Booth 6783)
Laminar-Flow
Clean Bench
Clean
Air Products
Minneapolis,
MN
Series-204
horizontal laminar-flow clean benches include an internal motorized
filter unit for full filter coverageand three-side access for easy cleaning.The benches are available in several sizes, ranging from 2 X
2 to 2 X 6 ft. They are designed for installation on top of an existing
tabletop, with the filter in the rear of the unit and the hood on the
front. The prefilter may be serviced from behind the unit. Additional
features include a decorative white-painted steel housing and an internal
motorized filter unit for full filter coverage. Options include a stainless-steel
housing, a stainless-steel hood, and an integrated light.
Linear
Motor Stages
Newport
Irvine,
CA
Offering
high performance with ease of integration, the IMS-LM linear motor stages
reduce stage length by more than 100 mm for space- constrained applications.
They have travel ranges from 300 to 600 mm; feature a robust, thermally
optimized design; and offer 5-nm resolution and motion sensitivity of
20 nm. The precision linear encoder and bearings can provide 0.5-µm
bidirectional repeatability and an on-axis accuracy of 10 µm at a maximum
speed of 500 mm/sec. The stages have a quiet, center-driven three-phase
synchronous iron-core linear motor that provides nearly twice the efficiency
of ironless linear motors. This design delivers 60 N rms force with
only 6°C rise in top-plate temperature. Precision position feedback
is supplied by a high-precision linear encoder that is interpolated
by the XPS motion controller to subnanometer resolution. (Semicon
West, South Hall, Booth 1934; Moscone West, Booth 7527)
In-Line
Chemical Metrology System
Metara
Sunnyvale,
CA
The
Sentry platform is a production-worthy in-line chemical metrology system
that determines chemical composition and potential yield- or process-limiting
defects. Featuring proprietary in-line mass spectrometry (ILMS) technology,
the platform forms the core of the chemical composition metrology (CCM)
and trace contamination metrology (TCM) systems. Sentry CCM deploys
ILMS technology to meet the chemical composition challenges associated
with copper ECD processes, including bath mismanagement, fill reproducibility
issues, mounding and overburden problems, and wafer-to-wafer consistency.
Sentry TCM uses ILMS technology to identify and quantify metallics and
organic contamination, protecting against potential yield-killing contamination.
ILMS technology eliminates the potential for external contamination
from manual sampling and the periodic drift associated with traditional
analytical techniques.
Depth,
CD Measurement System
Micro-Metric
San
Jose, CA
The
Innova-D system for automated depth and critical dimension (CD) measurement
employs sophisticated confocal optics to measure step heights and linewidths
on semiconductor, optoelectronic, and MEMS devices. Depth measurement
repeatability is 0.03 µm (3σ) and linewidth repeatability is 0.006
µm (3σ). The tool incorporates advanced features to ensure ultrahigh
precision and accuracy, such as laser interferometry for precise x-y
stage positioning, a durable granite base, and a vibration-isolation
platform. A proprietary vision-based autofocus feature provides the
repeatable focusing necessary for nanometer-level accuracy. The Innova
series of CD measurement systems are well suited for both point-to-point
and field-of-view applications. The systems incorporate sound metrology
principles and powerful image analysis algorithms to provide accurate
CD measurements of feature sizes down to 0.5 µm. (Semicon West,
South Hall, Booth 3044)
Motor
Control IC
Performance
Motion Devices
Lincoln,
MA
Offering
a precision velocity loop for brushless dc motors, the MC73110 motor
control IC operates in internal velocity profile mode, velocity mode
with an external velocity command signal, or torque mode with an external
torque command signal. The compact single-axis IC uses velocity feedback
from an encoder or via a direct-input analog tachometer signal. A velocity
scalar term, along with a sophisticated averaging velocity estimator,
enables precision velocity control of motor speed and acceleration across
a wide range of profiles. The IC can also be combined with a velocity
integrator loop when position loop control characteristics are required.
Utilizing an on-chip A/D convertor, the IC digitizes analog current
feedback and provides multiple current-sensing methods to maximize motor
performance. Only a MOSFET or IGBT triple half-bridge is needed to implement
a full-featured controller.
Extruded
Flat PVDF
Compression
Polymers
Moosic,
PA
For
use in the manufacture of process equipment such as wet benches and
rinse tanks, 1/2-in. extruded flat PVDF is available in 48 X 96-in.
and 48 X 120-in. sheets. The extruded sheets complement a line of compression-molded
sheets that range in thickness from 5/8 to 21/2 in. The company also
offers homopolymer PP, copolymer PP, HDPE, HDPE pipe grade, Flametec
CP7-D, cleanroom PVC-C, Corzan CPVC, and ultrawhite PVD.
Valveless
Piston Pump
Micropump
Vancouver,
WA
Series
PF, a valveless piston pump, meters and doses even soft-solid-containing
fluids. The pump's innovative valveless design virtually eliminates
clogging. It features a reciprocating and rotating piston, which ensures
smooth, accurate, and repeatable delivery. With flow rates to 1 L/min
(0.26 gal/min) and pressures to 6.89 bar (100 psi), the pump maintains
accurate flow throughout the entire pressure range. It comes with a
standard stepper motor that is easy to program and provides reproducible
results when used with an electronic controller. It is available in
a small package size and offers numerous mounting options and excellent
chemical compatibility.
Six-Axis
Nanopositioning System
Physik
Instrumente (PI)
Auburn,
MA
A
six-axis piezo nanopositioning and nanoscanning system, the P-587.6CD
is for use in nanomanufacturing, nanometrology, scanning microscopy,
optics, mask alignment, and other high-end applications. The system
offers six degrees of freedom, six-axis digital control, active trajectory-error
compensation, millisecond responsiveness, nanometer resolution, and
travel ranges to 800 µm. It also features an integrated autocalibration
function for fast setup and interchangeability of controllers and nanomechanisms.
The system has a parallel-metrology design for improved multiaxis precision.
With parallel metrology, all sensors measure the position of the same
moving platform against the same stationary reference (the fixed frame),
ensuring that all motion is inside the servo loop, no matter which actuator
may have caused it. The
parallel-kinematics, single-module design reduces inertia and the center
of gravity for fast response and settling. (Semicon West, North
Hall, Booth 6157)
The
Puma 9000 series of patterned-wafer inspection tools is for use at the
65-nm node and beyond. The tools incorporate Streak technology, which
combines advanced UV illumination optics with high-speed imaging to
provide a range of inspection modes optimized for critical-defect detection
without compromising throughput. Configurable and extendable across
several technology generations, the tools offer sensitivity and throughput
improvements over traditional laser scattering systems, enabling chipmakers
to implement higher sampling strategies to protect wafers in process.
With multiple inspection modes, the systems can be used in a variety
of process applications for both logic and memory production. They also
have effective pattern-filtering and noise-suppression capabilities,
which provide improved defect-signal capture on critical etch layers
in memory applications. (Semicon West, South Hall, Booth 426)
The
portable ultrasonic Fog-Gun is for use in environments that require
totally portable, visible vapor generation. The battery-powered, handheld,
on-demand fogger has no extension cords, is portable and lightweight,
and is equipped with a two-speed fan. Built-in tilt and level sensors
protect the transducers. A 6-ft hose can be used for remote fogging,
and a belt clip assists in easy transportation. The fogger is equipped
with a trigger-bypass switch for continuous fog use. Two battery packs
are included with the device; each battery lasts for approximately 50
minutes between chargings. The fogger has a water capacity of 1.25 cups
and a fog life of approximately 40 minutes.
Two
types of meters can help IC manufacturers to reuse spent ultrapure water:
vane meters made of PVC, 316 stainless steel, and Viton and plastic
see-through variable-area meters made from polysulphone. The vane meters
provide a local indication of flow rate and have a simple design. They
also have cost-effective transmitters for remote readouts, recording,
or data logging, and alarm switches that indicate flow failure. The
SX model accommodates 1/4- to 3/4-in. pipe and handles flows from 3
to 20 gal/min, while the MX model is for use with 3/4- to 2-in. pipe
and handles flows from 10 to 160 gal/min. Insite variable-area meters
enable users to see the fluid. They are available in a model for 1/2-
to 1-in. pipe that handles flows from 5 to 15 gal/min and a model for
3/4- to 1 1/2-in. pipe that handles flows from 20 to 50 gal/min.
For
use as a mass-production lithography light source at the 65-nm node
and below, the GT40A is a 4-kHz argon fluoride (ArF) excimer laser equipped
with an injection-locking resonator. The resonator ensures highly stable
emission of a deep ultraviolet beam with a high output of 45 W. It also
offers a spectral bandwidth of 0.2 pm for full-width half maximum and
0.5 pm for E95, the highest bandwidth level in the semiconductor industry.
In in-house and OEM tests, the laser has demonstrated stabilized high
performance, low running costs, and excellent reliability and uptime.
The injection-locking technology reduces the load on the laser optics.
In addition, the system configuration has been refined to reduce the
number of consumables (modules) and their replacement frequency. A self-diagnosis
function simplifies module replacement and serviceability.
Unit
L–series liquid-flow controllers use proprietary InFlo technology,
which is based on ultrasonic sensors and optimized signal-processing
algorithms. The unit controls and monitors slurry and liquid-chemical
recipes at the point of use. It is for use with flows ranging from 50
to 2000 ml/min and has an accuracy of ±1% of flow. (Semicon
West, South Hall, Booth 2426)
The
TableTop megasonic system is a single-substrate and specialty-parts
cleaning system in a compact package. The unit can be operated in continuous
or pulsed mode and has an LCD operator interface, recirculating process
fluid, and optional heat control. The system's transducer arrays, electronics,
controls, and software are all patented technologies. The standard configuration
is used to process 200-mm substrates. (Semicon West, North Hall,
Booth 5448)
Hermetically
sealed PAVE-Flex through-bulkhead electrical flex-circuit seals are
for use in low or high vacuum or pressure. The helium leak-tight seals
operate to <10–7 cm3/sec of helium at
10–8 Torr vacuum. Virtually any Kapton-insulated flex-circuit
design can be manufactured in space-saving, high-circuit-density, high-speed
designs. The seals are used in semiconductor processing equipment and
scanning electron microscopes.
The
Mini ScrewRail, a compact addition to a line of screw-rail linear actuators,
is for use in applications that require accurate positioning in a confined
space. The screw rail consists of a precision rolled leadscrew, supported
by sealed bearings and contained within a concentric steel guide rail
that drives an integrated nut/bushing. Because all the alignment requirements
are achieved within the screw rail, its support and positioning are
much less critical than with traditional slide assemblies. The component
is available with a 0.375-in. outside diameter. It has proprietary Kerkote
TFE coating on both the leadscrew and guide rail, minimizing drag torque
and extending wear life. (Semicon West, Gateway, Booth 3311)
For
use in 200- and 300-mm wafer applications, the LDS3300 C micro/macro
defect detection tool performs automated defect detection, classification,
and in-line review. Offering a throughput of up to 130 wafers per hour,
the tool combines the advantages of the INS3300 inspection and review
system with the ability to inspect the entire wafer surface for macroscopic
defects. Using simultaneous bright- and dark-field illumination, the
macro module captures a full-color image of the entire wafer surface.
The image is compared with all die on the wafer or to reference information.
Differences are considered defects and are compared with an image library
of known classified defect groups. Using automatic defect classification,
the system determines whether the wafer is in a go/no-go, in-line microscope
review, or alarm condition. (Semicon West, South Hall, Booth
1926; Moscone West, Booth 7521)
Strained-silicon-on-insulator
(sSOI) wafers enable a wide range of high-speed, low-power IC applications,
including those with high-performance logic cores. The 300-mm wafers'
electron mobility enhancement factor (up to 80%) is built into the substrate,
spreading the strain benefits to all regions of the IC and to all transistor
geometries. In addition, the substrates can break through the power-dissipation
barriers that are becoming an increasingly critical roadblock to higher-performing
chips. Manufactured using the patented Smart Cut process, the substrates
exhibit stress of 1.5 GPa with homogeneity of ±7% across the entire
wafer, which is equivalent to strain of almost 1%. The strained-silicon
layer is 200 Å thick with a uniformity of ±3% and has a surface
roughness comparable to that of premium bulk silicon wafers. (Semicon
West, North Hall, Booth 5425)
The
Aion Industrial 1064-32-V diode-pumped solid-state laser has a 32-W
TEM00 at 1064 nm. At 30 kHz, the laser's energy per pulse increases
to 1000 µJ. The infrared laser has a pulse width between 10 and 80 nanoseconds,
which is dependent on different repetition rates. The unit's modular
design and long life ensure excellent reliability and low maintenance.
The laser can be used to perform micromachining applications. (Semicon
West, Moscone West, Booth 9513)
By
reading, recording, and responding to industry-standard wafer identification,
the Wafer Reader offers the product traceability and real-time validation
required throughout the fabrication process. Integrated lensing and
lighting capabilities provide the flexibility required to read codes
consistently throughout production processes that change the wafer's
appearance. The instrument has high resolution of 1280 X 1024 pixels
and a large field of view of up to 34 X 26 mm. Its built-in processor,
a Texas Instruments DSP with 64 MByte RAM and 16 MByte Flash memory,
eliminates the need for a framegrabber or PC. The user interface supports
both Windows and Windows CE platforms, and its automated software programming
and light tuning provide quick and easy setup. The system handles 2-D
matrix codes, bar codes, and OCR; it supports SEMI M12, M13, T1, T2,
T3, and T7 codes, as well as IBM codes. (Semicon West, North
Hall, Booth 6783)
Series-204
horizontal laminar-flow clean benches include an internal motorized
filter unit for full filter coverage
Offering
high performance with ease of integration, the IMS-LM linear motor stages
reduce stage length by more than 100 mm for space- constrained applications.
They have travel ranges from 300 to 600 mm; feature a robust, thermally
optimized design; and offer 5-nm resolution and motion sensitivity of
20 nm. The precision linear encoder and bearings can provide 0.5-µm
bidirectional repeatability and an on-axis accuracy of 10 µm at a maximum
speed of 500 mm/sec. The stages have a quiet, center-driven three-phase
synchronous iron-core linear motor that provides nearly twice the efficiency
of ironless linear motors. This design delivers 60 N rms force with
only 6°C rise in top-plate temperature. Precision position feedback
is supplied by a high-precision linear encoder that is interpolated
by the XPS motion controller to subnanometer resolution. (Semicon
West, South Hall, Booth 1934; Moscone West, Booth 7527)
The
Sentry platform is a production-worthy in-line chemical metrology system
that determines chemical composition and potential yield- or process-limiting
defects. Featuring proprietary in-line mass spectrometry (ILMS) technology,
the platform forms the core of the chemical composition metrology (CCM)
and trace contamination metrology (TCM) systems. Sentry CCM deploys
ILMS technology to meet the chemical composition challenges associated
with copper ECD processes, including bath mismanagement, fill reproducibility
issues, mounding and overburden problems, and wafer-to-wafer consistency.
Sentry TCM uses ILMS technology to identify and quantify metallics and
organic contamination, protecting against potential yield-killing contamination.
ILMS technology eliminates the potential for external contamination
from manual sampling and the periodic drift associated with traditional
analytical techniques.
The
Innova-D system for automated depth and critical dimension (CD) measurement
employs sophisticated confocal optics to measure step heights and linewidths
on semiconductor, optoelectronic, and MEMS devices. Depth measurement
repeatability is 0.03 µm (3σ) and linewidth repeatability is 0.006
µm (3σ). The tool incorporates advanced features to ensure ultrahigh
precision and accuracy, such as laser interferometry for precise x-y
stage positioning, a durable granite base, and a vibration-isolation
platform. A proprietary vision-based autofocus feature provides the
repeatable focusing necessary for nanometer-level accuracy. The Innova
series of CD measurement systems are well suited for both point-to-point
and field-of-view applications. The systems incorporate sound metrology
principles and powerful image analysis algorithms to provide accurate
CD measurements of feature sizes down to 0.5 µm. (Semicon West,
South Hall, Booth 3044)
Offering
a precision velocity loop for brushless dc motors, the MC73110 motor
control IC operates in internal velocity profile mode, velocity mode
with an external velocity command signal, or torque mode with an external
torque command signal. The compact single-axis IC uses velocity feedback
from an encoder or via a direct-input analog tachometer signal. A velocity
scalar term, along with a sophisticated averaging velocity estimator,
enables precision velocity control of motor speed and acceleration across
a wide range of profiles. The IC can also be combined with a velocity
integrator loop when position loop control characteristics are required.
Utilizing an on-chip A/D convertor, the IC digitizes analog current
feedback and provides multiple current-sensing methods to maximize motor
performance. Only a MOSFET or IGBT triple half-bridge is needed to implement
a full-featured controller.
For
use in the manufacture of process equipment such as wet benches and
rinse tanks, 1/2-in. extruded flat PVDF is available in 48 X 96-in.
and 48 X 120-in. sheets. The extruded sheets complement a line of compression-molded
sheets that range in thickness from 5/8 to 21/2 in. The company also
offers homopolymer PP, copolymer PP, HDPE, HDPE pipe grade, Flametec
CP7-D, cleanroom PVC-C, Corzan CPVC, and ultrawhite PVD.
Series
PF, a valveless piston pump, meters and doses even soft-solid-containing
fluids. The pump's innovative valveless design virtually eliminates
clogging. It features a reciprocating and rotating piston, which ensures
smooth, accurate, and repeatable delivery. With flow rates to 1 L/min
(0.26 gal/min) and pressures to 6.89 bar (100 psi), the pump maintains
accurate flow throughout the entire pressure range. It comes with a
standard stepper motor that is easy to program and provides reproducible
results when used with an electronic controller. It is available in
a small package size and offers numerous mounting options and excellent
chemical compatibility.
A
six-axis piezo nanopositioning and nanoscanning system, the P-587.6CD
is for use in nanomanufacturing, nanometrology, scanning microscopy,
optics, mask alignment, and other high-end applications. The system
offers six degrees of freedom, six-axis digital control, active trajectory-error
compensation, millisecond responsiveness, nanometer resolution, and
travel ranges to 800 µm. It also features an integrated autocalibration
function for fast setup and interchangeability of controllers and nanomechanisms.
The system has a parallel-metrology design for improved multiaxis precision.
With parallel metrology, all sensors measure the position of the same
moving platform against the same stationary reference (the fixed frame),
ensuring that all motion is inside the servo loop, no matter which actuator
may have caused it. The
parallel-kinematics, single-module design reduces inertia and the center
of gravity for fast response and settling. (Semicon West, North
Hall, Booth 6157)