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| Figure
3: Contours of oxygen mass fraction for case 8 configuration (nitrogen curtain,
plenum velocity of 140 ft/min, FOUP inlet port purge flow rate of 60 L/min):
(a) on a plane passing through the center of the FOUP and parallel to the
side walls of the system; (b) on a plane 8 cm from the FOUP center through
the middle of one of the FOUP inlet ports; and (c) on a plane 12 cm from
the FOUP center toward the center of the minienvironment. |
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