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| Figure
2: Contours of oxygen mass fraction for case 2 configuration (no nitrogen
curtain, FOUP inlet port purge flow rate of 60 L/min): (a) on a plane passing
through the center of the FOUP and parallel to the sidewalls of the system;
(b) on a plane 8 cm from the FOUP center, through the middle of one of the
FOUP inlet ports; and (c) on a plane 12 cm from the FOUP center toward the
center of the minienvironment. |
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