An
analysis tool combines x-ray microanalysis (EDS), electron diffraction
(EBSD), and wavelength-dispersal spectrometry (WDS). The Trident microanalysis
tool reduces or eliminates the need to compromise the performance of one
analysis method to optimize the performance of another, depending on the
scanning electron microscope’s chamber configuration. The system
integrates all three techniques into a single PC environment. Its hardware
and software provide all three techniques with data-sharing capacity and
improve data-processing speed and accuracy. For additional analytical
capability on a scanning electron microscope, a WDS spectrometer can be
added to the EDS or EBSD system. The LambdaSpecWDS overcomes problems
associated with interfacing SEM and WDS. (Semicon West, S.F., North Hall,
Booth 6344)
Differential
Pressure Controller Dwyer Instruments Michigan City, IN
The Series DH DigiHelic differential pressure
controller is for use in pressure, velocity, and flow applications. Achieving
0.5% full-scale accuracy on ranges from 5 to 100 in.H2O, the controller
provides 4–20-mA process output and has 2 single-pole double-throw
(SPDT) relays with adjustable dead bands. The unit can be programmed via
a menu key. Users can select from a multitude of options, including security
level, setpoint or setpoint-and-alarm operation, automatic or manual alarm
reset, English or metric engineering units, K-factor adjustment for use
with flow sensors, and circular or rectangular duct size for volumetric
flow operation. The unit operates on either 120/220 V ac or 24 V dc. Modbus
communication is standard with every unit. (Semicon West, S.F., North
Hall, Booth 5181)
Benchtop
Weld Head Arc
Machines Pacoima, CA
The Model 4-500 benchtop weld head is a
fully integrated tube weld-head system with an available fixturing plate
that is designed for high-production bench welding of short stick-out
fittings, tubes, tube-to-valve bodies, and other similar assemblies. The
system can be used by itself or with a variety of stands and blocks, which
can be used to support valves, regulators, and tubing during welding.
The unit’s quick-release tooling is sturdy and accurate, ensuring
that objects to be welded can be gripped securely. Because of the water-cooling
function of both the base unit and the weld-head rotor, the system can
perform more welding duty cycles than narrow weld heads. (Semicon West,
S.F., South Hall, Booth 2101)
Atomic-Layer Deposition System Aviza Technology Scotts Valley, CA
The Pantheon atomic-layer deposition system is a configurable 200-/ 300-mm
tool for the 65-nm node and beyond. The system offers precise atomic-level
thickness control, low process temperature, and highly conformal coatings
with excellent film quality. The multichamber cluster tool is composed
of up to four process chambers connected to a central backbone hub. Two
dual-stage loadlocks act as an interface between the hub and a self-contained
atmospheric front end. Two loadport modules are attached to the front
end for material loading and unloading. Process modules use showerhead
injectors and ozone-based reactant for optimum process performance.The
unit performs high-k capacitor, high-k gate dielectric, high-k interpoly,
etch-stop/barrier layer, passivation, and other applications. (Semicon
West, S.F., South Hall, Booth 1537)
Fab Data Integration Package Knights Technology Sunnyvale, CA
A hardware-independent software system that allows engineers to quickly
collect, correlate, analyze, and graphically display or report essential
fab data, YieldManager helps chipmakers to achieve and maintain higher
yields. The system’s automated analysis functionality provides engineers
with instant insight into significant sources of yield loss, enabling
them to improve productivity and reduce infrastructure costs. A variety
of add-ons are available. Data Explorer allows engineers to analyze defect
trends and perform advanced statistical analysis of defect data. SpaR
recognizes spatial patterns, grouping defects into signatures that can
then be classified into process events. LogicMap enables the automatic
overlay of logic device failure information at the signal level, reducing
traditional translation times from weeks to hours. (Semicon West, S.F.,
South Hall, Booth 1316; S.J., Parkside Hall, Booth 14007)
Diaphragm Check Valves Plast-O-Matic
Cedar Grove, NJ
Diaphragm check valves used for preventing reverse flow in liquid piping
systems and other chemical processes are designed for applications that
require Corzan, which can resist elevated temperatures and corrosion.
The valves’ diaphragm design provides a positive leak-free seal
even when they are in a nonflowing condition. Unlike ball-type checks,
the diaphragm valves are not dependent on gravity, mounting position,
or reverse flow to function properly. The valves are available with 1⁄2-,
3⁄4-, and 1-in. pipeline connections. (Semicon West, S.F., North
Hall, Booth 5575)
Deposition Bath Control System ECI Technology East Rutherford, NJ
The Quali-Line QLC-8000 is an
on-line control system for electroless deposition baths used in VLSI interconnect
cobalt capping applications. The system has a special electrochemical/titrating
two-cell design, which
enables prompt response times for all key components, including cobalt, copper, hypophosphite, reducing/complexing/buffering agents, pH adjuster, and background ions. The system
can also control copper and nickel electroless deposition solutions. In
addition, it can be upgraded to perform spectroscopic measurements of
tungstate, palladium, and other metal concentrations. (Semicon West, S.F.,
South Hall, Booth 2442; S.J., McEnery Hall, Booth 11641)
Conductive AFM Module Asylum Research Santa Barbara, CA
The Orca module performs conductive atomic force microscope (AFM) measurements
on the MFP-3D system. Used for characterizing a variety of materials such
as dielectric films, the module makes current measurements in the range
of hundreds of femtoamps to nearly a microamp and provides a wide range
of current measurement options with near Johnson noise–limited performance.
It consists of a specially designed cantilever holder that includes a
transimpedance amplifier. Users can choose the gain of the amplifier.
Standard values range from 5 x 107 to 5 x 109 V/A. The cantilever holder
is used with conductive AFM probes to make the measurement.
Zeta-Potential Probe
Dispersion Technology Bedford Hills, NY
The DT-300 zeta-potential probe measures electrokinetic potential in aqueous
and nonaqueous concentrated dispersions and emulsions. It utilizes an
electroacoustic phenomenon that makes it suitable for concentrates with
a volume fraction exceeding roughly 0.1%, and it has practically no upper
limit. Precision is approximately 0.1 mV. Measurement time is as low as
15 seconds for concentrated aqueous oxide dispersions. Sample volume can
be as little as 2 ml. The probe can be inserted into a pipe for continuous
in-line monitoring.
Ball Valves
George Fischer Tustin, CA
Suitable for use in many applications, Type
546 ball valves are available
in beta-pp (polypropylene) and polyvinylidene (PVDF) configurations. beta-pp
material offers excellent chemical resistance, high stiffness, and maximum
durability. It is suitable for applications with operating temperatures
ranging from –10° to 95°C. The PVDF material is a semicrystalline
thermoplastic that exhibits high temperature and chemical resistance without
the use of additives such as heat stabilizers. Thus, it resists most inorganic
acids, UV light, gamma rays, flames, and abrasion. It is for use in temperatures
ranging from –20° to 140°C. The valves are available in
3⁄8- to 2-in. sizes, and their robust buttress thread design provides
a strong connection for maximum safety. (Semicon West, S.F., South Hall,
Booth 417)
Miniature Guideway Module Schneeberger Bedford, MA
The Minimodule is a compact, belt-driven
linear guidance system with a miniature ball guideway and tooth belt drive.
With a small cross section and a minimum height of 16 mm, the unit is
one of the most compact in the marketplace. The rail, carriage, and main
structure of the module are manufactured from corrosion-resistant stainless
steel and are thus suitable for use in high-
accuracy applications. Based on Minirail sizes 9, 15, and 42, the module
is available in corresponding sizes MLM 9, MLM 15, and MLM 42. A maximum
length of 1142 mm is available and a maximum stroke of 886 mm is possible.
(Semicon West, S.F., North Hall, Booth 5536)
Cartridge Filters Mykrolis Billerica, MA
QuickChange ATM 0.03- and 0.05-µm cartridge filters are designed
for aqueous-based chemicals used in wet-etch applications. The cartridge
filters incorporate a new membrane pleat pack, which provides 40% greater
membrane surface area than QuickChange ATX filters. This improvement leads
to higher flow rates, which aid in the recirculation and recovery of chemical
baths. Patented nondewetting membranes deliver high retention at 0.03
and 0.05 µm and have been manufactured to withstand high-temperature
applications up to 180°C. (Semicon West, S.F., South Hall, Booth 726)
Manufacturing Execution System Brooks Automation Chelmsford, MA
Factoryworks3, a third-generation manufacturing execution system (MES),
performs modeling, process planning, wafer tracking, data collection and
analysis, and equipment monitoring and dispatching. The system supports
the real-time enterprise, strengthening collaborative manufacturing and
supply-chain execution via a Web services and thin-client framework. Additionally,
the package is the first MES to perform integrated equipment maintenance
management, corrective/preventive action, and durables management. (Semicon
West, S.F., South Hall, Booth 2526)
Fluorine Dry Pumps BOC Edwards Wilmington, MA
Building on a line of iH-range harsh-duty dry vacuum pumps, the iH-F series
has been optimized for chemical vapor deposition and etch applications
using high fluorine gas streams. The dry pumps offer new features to enhance
operating safety, reduce the effects of corrosion, and reduce the cost
of ownership. All models include an innovative sensing system to detect
seal deterioration inside the pump, providing seal change guidance and
extending service intervals. The series is available in a range of peak
speeds from 80 to 1800 m3/hr. Upgrades to iH-series dry pumps are available
through the company’s global service network. (Semicon West, S.F.,
South Hall, Booth 716)
Micromachining Laser System New Wave Research Fremont, CA
The LaserMill benchtop Nd:YAG laser micromilling tool is for use in R&D,
prototyping, pilot-line development, and short-run production applications.
The system features switchable- wavelength operation for machining a variety
of organic and inorganic materials in MEMS, semiconductor, and other devices.
Applications range from passivation and polyimide removal to lab-on-a-chip
production. A flexible alternative to outsourcing, the 18 x 30-in. tool
fits on most workbenches. It is equipped with 100 x 100-mm stages, a high-magnification
video microscope, and a continuously variable, rotating x-y shutter that
yields cut sizes down to nearly 1.0 µm.
An
analysis tool combines x-ray microanalysis (EDS), electron diffraction
(EBSD), and wavelength-dispersal spectrometry (WDS). The Trident microanalysis
tool reduces or eliminates the need to compromise the performance of one
analysis method to optimize the performance of another, depending on the
scanning electron microscope’s chamber configuration. The system
integrates all three techniques into a single PC environment. Its hardware
and software provide all three techniques with data-sharing capacity and
improve data-processing speed and accuracy. For additional analytical
capability on a scanning electron microscope, a WDS spectrometer can be
added to the EDS or EBSD system. The LambdaSpecWDS overcomes problems
associated with interfacing SEM and WDS. (Semicon West, S.F., North Hall,
Booth 6344)
The Series DH DigiHelic differential pressure
controller is for use in pressure, velocity, and flow applications. Achieving
0.5% full-scale accuracy on ranges from 5 to 100 in.H2O, the controller
provides 4–20-mA process output and has 2 single-pole double-throw
(SPDT) relays with adjustable dead bands. The unit can be programmed via
a menu key. Users can select from a multitude of options, including security
level, setpoint or setpoint-and-alarm operation, automatic or manual alarm
reset, English or metric engineering units, K-factor adjustment for use
with flow sensors, and circular or rectangular duct size for volumetric
flow operation. The unit operates on either 120/220 V ac or 24 V dc. Modbus
communication is standard with every unit. (Semicon West, S.F., North
Hall, Booth 5181) 
The Model 4-500 benchtop weld head is a
fully integrated tube weld-head system with an available fixturing plate
that is designed for high-production bench welding of short stick-out
fittings, tubes, tube-to-valve bodies, and other similar assemblies. The
system can be used by itself or with a variety of stands and blocks, which
can be used to support valves, regulators, and tubing during welding.
The unit’s quick-release tooling is sturdy and accurate, ensuring
that objects to be welded can be gripped securely. Because of the water-cooling
function of both the base unit and the weld-head rotor, the system can
perform more welding duty cycles than narrow weld heads. (Semicon West,
S.F., South Hall, Booth 2101)
The Pantheon atomic-layer deposition system is a configurable 200-/ 300-mm
tool for the 65-nm node and beyond. The system offers precise atomic-level
thickness control, low process temperature, and highly conformal coatings
with excellent film quality. The multichamber cluster tool is composed
of up to four process chambers connected to a central backbone hub. Two
dual-stage loadlocks act as an interface between the hub and a self-contained
atmospheric front end. Two loadport modules are attached to the front
end for material loading and unloading. Process modules use showerhead
injectors and ozone-based reactant for optimum process performance.The
unit performs high-k capacitor, high-k gate dielectric, high-k interpoly,
etch-stop/barrier layer, passivation, and other applications. (Semicon
West, S.F., South Hall, Booth 1537)
A hardware-independent software system that allows engineers to quickly
collect, correlate, analyze, and graphically display or report essential
fab data, YieldManager helps chipmakers to achieve and maintain higher
yields. The system’s automated analysis functionality provides engineers
with instant insight into significant sources of yield loss, enabling
them to improve productivity and reduce infrastructure costs. A variety
of add-ons are available. Data Explorer allows engineers to analyze defect
trends and perform advanced statistical analysis of defect data. SpaR
recognizes spatial patterns, grouping defects into signatures that can
then be classified into process events. LogicMap enables the automatic
overlay of logic device failure information at the signal level, reducing
traditional translation times from weeks to hours. (Semicon West, S.F.,
South Hall, Booth 1316; S.J., Parkside Hall, Booth 14007)
Diaphragm check valves used for preventing reverse flow in liquid piping
systems and other chemical processes are designed for applications that
require Corzan, which can resist elevated temperatures and corrosion.
The valves’ diaphragm design provides a positive leak-free seal
even when they are in a nonflowing condition. Unlike ball-type checks,
the diaphragm valves are not dependent on gravity, mounting position,
or reverse flow to function properly. The valves are available with 1⁄2-,
3⁄4-, and 1-in. pipeline connections. (Semicon West, S.F., North
Hall, Booth 5575)
The Quali-Line QLC-8000 is an
on-line control system for electroless deposition baths used in VLSI interconnect
cobalt capping applications. The system has a special electrochemical/titrating
two-cell design, which
enables prompt response times for all key components, including cobalt, copper, hypophosphite, reducing/complexing/buffering agents, pH adjuster, and background ions. The system
can also control copper and nickel electroless deposition solutions. In
addition, it can be upgraded to perform spectroscopic measurements of
tungstate, palladium, and other metal concentrations. (Semicon West, S.F.,
South Hall, Booth 2442; S.J., McEnery Hall, Booth 11641)
The Orca module performs conductive atomic force microscope (AFM) measurements
on the MFP-3D system. Used for characterizing a variety of materials such
as dielectric films, the module makes current measurements in the range
of hundreds of femtoamps to nearly a microamp and provides a wide range
of current measurement options with near Johnson noise–limited performance.
It consists of a specially designed cantilever holder that includes a
transimpedance amplifier. Users can choose the gain of the amplifier.
Standard values range from 5 x 107 to 5 x 109 V/A. The cantilever holder
is used with conductive AFM probes to make the measurement.
The DT-300 zeta-potential probe measures electrokinetic potential in aqueous
and nonaqueous concentrated dispersions and emulsions. It utilizes an
electroacoustic phenomenon that makes it suitable for concentrates with
a volume fraction exceeding roughly 0.1%, and it has practically no upper
limit. Precision is approximately 0.1 mV. Measurement time is as low as
15 seconds for concentrated aqueous oxide dispersions. Sample volume can
be as little as 2 ml. The probe can be inserted into a pipe for continuous
in-line monitoring.
Suitable for use in many applications, Type
546 ball valves are available
in beta-pp (polypropylene) and polyvinylidene (PVDF) configurations. beta-pp
material offers excellent chemical resistance, high stiffness, and maximum
durability. It is suitable for applications with operating temperatures
ranging from –10° to 95°C. The PVDF material is a semicrystalline
thermoplastic that exhibits high temperature and chemical resistance without
the use of additives such as heat stabilizers. Thus, it resists most inorganic
acids, UV light, gamma rays, flames, and abrasion. It is for use in temperatures
ranging from –20° to 140°C. The valves are available in
3⁄8- to 2-in. sizes, and their robust buttress thread design provides
a strong connection for maximum safety. (Semicon West, S.F., South Hall,
Booth 417)
The Minimodule is a compact, belt-driven
linear guidance system with a miniature ball guideway and tooth belt drive.
With a small cross section and a minimum height of 16 mm, the unit is
one of the most compact in the marketplace. The rail, carriage, and main
structure of the module are manufactured from corrosion-resistant stainless
steel and are thus suitable for use in high-
accuracy applications. Based on Minirail sizes 9, 15, and 42, the module
is available in corresponding sizes MLM 9, MLM 15, and MLM 42. A maximum
length of 1142 mm is available and a maximum stroke of 886 mm is possible.
(Semicon West, S.F., North Hall, Booth 5536)
QuickChange ATM 0.03- and 0.05-µm cartridge filters are designed
for aqueous-based chemicals used in wet-etch applications. The cartridge
filters incorporate a new membrane pleat pack, which provides 40% greater
membrane surface area than QuickChange ATX filters. This improvement leads
to higher flow rates, which aid in the recirculation and recovery of chemical
baths. Patented nondewetting membranes deliver high retention at 0.03
and 0.05 µm and have been manufactured to withstand high-temperature
applications up to 180°C. (Semicon West, S.F., South Hall, Booth 726)
Factoryworks3, a third-generation manufacturing execution system (MES),
performs modeling, process planning, wafer tracking, data collection and
analysis, and equipment monitoring and dispatching. The system supports
the real-time enterprise, strengthening collaborative manufacturing and
supply-chain execution via a Web services and thin-client framework. Additionally,
the package is the first MES to perform integrated equipment maintenance
management, corrective/preventive action, and durables management. (Semicon
West, S.F., South Hall, Booth 2526)
Building on a line of iH-range harsh-duty dry vacuum pumps, the iH-F series
has been optimized for chemical vapor deposition and etch applications
using high fluorine gas streams. The dry pumps offer new features to enhance
operating safety, reduce the effects of corrosion, and reduce the cost
of ownership. All models include an innovative sensing system to detect
seal deterioration inside the pump, providing seal change guidance and
extending service intervals. The series is available in a range of peak
speeds from 80 to 1800 m3/hr. Upgrades to iH-series dry pumps are available
through the company’s global service network. (Semicon West, S.F.,
South Hall, Booth 716)
The LaserMill benchtop Nd:YAG laser micromilling tool is for use in R&D,
prototyping, pilot-line development, and short-run production applications.
The system features switchable- wavelength operation for machining a variety
of organic and inorganic materials in MEMS, semiconductor, and other devices.
Applications range from passivation and polyimide removal to lab-on-a-chip
production. A flexible alternative to outsourcing, the 18 x 30-in. tool
fits on most workbenches. It is equipped with 100 x 100-mm stages, a high-magnification
video microscope, and a continuously variable, rotating x-y shutter that
yields cut sizes down to nearly 1.0 µm.