Sample ID Material Thickness (Å) Typical Nanoindentation Modulus (GPa)a Symmetry Surface Wave Results Young's Modulus (GPa) Poisson's Ratio(σ) Compressional Modulus Out-of-PlaneC33 (GPa) Compressional ModulusIn-PlaneC11 (GPa)c Shear ModulusC44 (GPa) 1 Coral 10,360 9 Isotropic 6.0 0.198 6.6 6.6 2.5 2 HMS Coral 10,055 15 Isotropic 10.9 0.229 12.6 12.6 4.4 2A HMS Coral 1,581 — Isotropic 11.2 0.205b 12.5 12.5 4.6 2B HMS Coral 2,637 — Isotropic 11.1 0.205b 12.5 12.5 4.6 2C HMS Coral 5,312 — Isotropic 11.1 0.206 12.5 12.5 4.6 2D HMS Coral 5,313 — Isotropic 11.1 0.205 12.5 12.5 4.6 2E HMS Coral 7,912 — Isotropic 11.3 0.202 12.6 12.6 4.7 3 11,792 7.8 Anisotropic 1.8 — 2.1 6.4 1.1 a Samples 2A­2E were below the thickness capability of the nanoindentation technique. b Set to the average of samples 2C­2E. c For samples 1­2E, C11 was equal to C33 because of the isotropic model.

Table I: SAW results for a range of film samples. Measurements were made at the wafer center.