Contaminant
U.S.
Q1/03
U.S.
Q2/03
U.S.
Q3/03
Japan
Q1/03
China
Q3/03
Taiwan
Q1/03
Europe
Q2/03
Korea
Q3/03
NH
3
(ppbv)
16.1
2.7
7.7
6.9
19.0
9.0
26.2
16.9
Acids/SO
2
(ppbv)
0.4
1.5
0.8
0.4
0.7
1.0
1.0
0.3
Organics (ppbv)
17.0
107.0
18.2
—
27.0
24.0
33.0
33.5
Table I: Air-sampling results obtained in 2003 from several fabs worldwide. "Organics" refers to condensable organic species, not total volatile organic compounds.