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Capacity
(std cu ft/hr)
Initial Cost ($)1
Annual
Operating
Cost Increase ($)
Lead time
(months)
First-Year Cost ($ per std cu ft/hr)
Five-Year
Cost
Separate litho CDA system
42,000
500,000
50,000
7
13.10
750,000
Booster compressors
25,000
300,000
20,000
5
12.80
400,000
Separate CDA system
50,000
750,000
60,000
7
16.20
1,050,000
Main CDA-system upgrade2
60,000
900,000
100,000
10
16.67
1,400,000
1 These are budgetary costs, which may vary regionally.
2 This can be a lease cost (expense). For the purposes of comparison, it is shown as a capital cost.
Table I: Options that were investigated to upgrade fab CDA systems.

 


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